Abstract: An apparatus and method for measuring air currents on the surface of a substrate, which can accurately measure the magnitude and direction of air currents on the surface of a wafer with wafer-type air current measurement sensors, are provided. The apparatus includes: a first air current measurement module measuring a magnitude of air currents on a surface of a first substrate, which is processed in accordance with a semiconductor manufacturing process; a second air current measurement module measuring a movement direction of the air currents; and a power module supplying power to the first and second air current measurement modules, wherein the first air current measurement module, the second air current measurement module, and the power module are mounted on a second substrate, which has the same shape as the first substrate.

Abstract: The present specification relates to a conductive structure body, a method for manufacturing the same, and an electrode and an electronic device including the conductive structure body.

Abstract: Provided are surgical instrument including a base body, a shaft unit extending in a direction from the base body and having an end at which an end effector is mounted, a gear unit including a first gear mounted on the base body and a second gear mounted on another end of the shaft unit and engaged with the first gear, and a bearing unit positioned between the base body and the first gear.

Abstract: One aspect of the present disclosure provides a device for extracting and transmitting data from a shop floor image, the device comprising: an encoder configured for receiving, from a facility operating system, streaming video data of a display screen of a monitor of the facility operating system on a shop floor, and for encoding the streaming video data in real time; a video data analyzer configured for receiving the real-time encoded streaming video data and for extracting data by figuring out and tagging a data presentation location in the real-time encoded streaming video data using a video data analysis algorithm; and a communication unit configured for transmitting to a data engine the real-time encoded streaming video data, and the data extracted by the video data analyzer.

Abstract: One aspect of the present disclosure provides a device for extracting and transmitting data from a shop floor image, the device comprising: an encoder configured for receiving, from a facility operating system, streaming video data of a display screen of a monitor of the facility operating system on a shop floor, and for encoding the streaming video data in real time; a video data analyzer configured for receiving the real-time encoded streaming video data and for extracting data by figuring out and tagging a data presentation location in the real-time encoded streaming video data using a video data analysis algorithm; and a communication unit configured for transmitting to a data engine the real-time encoded streaming video data, and the data extracted by the video data analyzer.

Abstract: A method for collecting vehicle-related data is disclosed. The method includes: obtaining navigation streaming video data related to a vehicle operation and vehicle operation information from a first terminal handling vehicle operation information; encoding in real time the navigation streaming video data, which is received from the first terminal via a wired or wireless network, by an encoder; and synchronizing and storing the real-time encoded navigation streaming video data and vehicle operation information based on time information.

Abstract: The present invention relates to a method for patterning a metal nanowire-based transparent conductive film through surface treatment and, more particularly, to a method wherein the refractive index is adjusted by adding an optical functional layer prior to a patterning process, the surface of a metal nanowire transparent conductive film is oxidized using a surface treatment agent composition or a salt compound is generated, thereby changing the color and insulating the surface, and a film having excellent visibility is patterned.

Abstract: The present invention relates to a method for patterning a metal nanowire-based transparent conductive film through surface treatment and, more particularly, to a method wherein the refractive index is adjusted by adding an optical functional layer prior to a patterning process, the surface of a metal nanowire transparent conductive film is oxidized using a surface treatment agent composition or a salt compound is generated, thereby changing the color and insulating the surface, and a film having excellent visibility is patterned.

Abstract: In a polishing method, a substrate having a layer formed thereon is polished. A measurement spectrum is obtained by detecting light reflected from the polished surface of the substrate. A skew spectrum between a golden spectrum for a target thickness and the measurement spectrum is obtained. A Fourier transform operation is performed on the skew spectrum to calculate a thickness of the layer.

Abstract: Provided is a method for producing Ag nanowires, including, heating a precursor solution that includes: an Ag salt; a water-soluble polymer; a surfactant, or a halide of metal ions having a standard reduction potential of ?0.1 to ?0.9V as a metal catalyst; and a reduction solvent, to produce the Ag nanowires. According to this method, a time for synthesizing nanowires may be considerably decreased, and an amount of Ag precursor discarded without reaction may be effectively reduced. As a result, the Ag nanowires may be produced with high efficiency and mass-production thereof through a simple scale-up may be successfully achieved.

Abstract: In an optical measuring method, a first spectrum and a second spectrum are obtained from a pattern and a thin layer formed on the pattern by a deposition process using an ellipsometer respectively. A skew spectrum is obtained between the first spectrum and the second spectrum. A fourier transform operation is performed on the skew spectrum to calculate a thickness of the thin layer on the pattern.

Abstract: In an optical measuring method, a reflected light from a structure on a substrate is detected by a measuring tool to obtain a raw spectrum. The raw spectrum in a wavelength range having spectrum sensitivity to process variation is analyzed to determine a process variation of an actual process performed on the substrate. The raw spectrum is corrected according to a spectrum offset for the measuring tool which is determined based on the process variation.

Abstract: In an optical measuring method, a first spectrum and a second spectrum are obtained from a pattern and a thin layer formed on the pattern by a deposition process using an ellipsometer respectively. A skew spectrum is obtained between the first spectrum and the second spectrum. A fourier transform operation is performed on the skew spectrum to calculate a thickness of the thin layer on the pattern.

Abstract: In an optical measuring method, a reflected light from a structure on a substrate is detected by a measuring tool to obtain a raw spectrum. The raw spectrum in a wavelength range having spectrum sensitivity to process variation is analyzed to determine a process variation of an actual process performed on the substrate. The raw spectrum is corrected according to a spectrum offset for the measuring tool which is determined based on the process variation.

Abstract: An apparatus and method of searching for an instance path based on an ontology schema are provided. The method of searching for an instance path based on an ontology schema, which is performed by an instance path search apparatus, includes (a) receiving two or more keywords from a user and generating a pair of instances with respect to the keywords, respectively, (b) extracting a pair of classes corresponding to each of the pairs of instances from an ontology instance database, respectively, (c) obtaining an ontology schema path with respect to each of the pairs of classes from an ontology schema path database, respectively, and (d) replacing start and end classes with corresponding first and second instances in each of the ontology schema paths and searching for an instance path connected between the first instance and the second instance, respectively.

Abstract: A personalized service system and method based on an ontology is provided, in which if a user selects a personalized service while a subject or an object in a user profile ontology of user's personal information is associated with a subject or an object of a personalized service ontology through a relationship name, the system and method searches for a personalized service ontology corresponding to the selected personalized service, acquires personal information of an instance form in the user profile ontology associated with the personalized service ontology, executes the personalized service by applying the acquired personal information, and provides the user with a result of the execution.

Abstract: A method and apparatus for storing a triple and an inference dependency indexing apparatus appropriate to the method and system are provided. The method of storing a triple related to an inference method for creating other triples by applying an inference rule to the triple includes: (a) adding a serial number to each of triples and inference rules related to inference and storing the triples and the inference rules into a plurality of triple tables and inference rule tables; (b) indexing a triple inferred by applying the triple and the inference rule, using a serial number of the triple and a serial number of the inference rule related to inference; and (c) creating a triple view which allows accessing the triples physically distributed and stored in a plurality of triple storage units (tables) as if the triples are stored in a virtual storage unit (table).

Abstract: An apparatus and method of searching and visualizing an instance path, which can search for a path between class-based instances and effectively display a path between two or more instances in order to rapidly search for diverse and complex relationships and search for a relationship between instances based on a relationship between classes in order to avoid comparison between the relationship being searched and the relationship of unnecessary objects when comparing the relationship between instances, are provided.