Patents by Inventor Dong Seung Lee

Dong Seung Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for batch non-contact material characterization
    Patent number: 8441653
    Abstract: An apparatus for performing non-contact material characterization includes a wafer carrier adapted to hold a plurality of substrates and a material characterization device, such as a device for performing photoluminescence spectroscopy. The apparatus is adapted to perform non-contact material characterization on at least a portion of the wafer carrier, including the substrates disposed thereon.
    Type: Grant
    Filed: June 13, 2012
    Date of Patent: May 14, 2013
    Assignee: Veeco Instruments Inc.
    Inventors: Dong Seung Lee, Mikhail Belousov, Eric A. Armour, William E. Quinn
  • Apparatus and Method for Batch Non-Contact Material Characterization
    Publication number: 20120248336
    Abstract: An apparatus for performing non-contact material characterization includes a wafer carrier adapted to hold a plurality of substrates and a material characterization device, such as a device for performing photoluminescence spectroscopy. The apparatus is adapted to perform non-contact material characterization on at least a portion of the wafer carrier, including the substrates disposed thereon.
    Type: Application
    Filed: June 13, 2012
    Publication date: October 4, 2012
    Applicant: VEECO INSTRUMENTS INC.
    Inventors: Dong Seung Lee, Mikhail Belousov, Eric A. Armour, William E. Quinn
  • Apparatus and method for batch non-contact material characterization
    Patent number: 8198605
    Abstract: An apparatus for performing non-contact material characterization includes a wafer carrier adapted to hold a plurality of substrates and a material characterization device, such as a device for performing photoluminescence spectroscopy. The apparatus is adapted to perform non-contact material characterization on at least a portion of the wafer carrier, including the substrates disposed thereon.
    Type: Grant
    Filed: August 12, 2011
    Date of Patent: June 12, 2012
    Assignee: Veeco Instruments Inc.
    Inventors: Dong Seung Lee, Mikhail Belousov, Eric A. Armour, William E. Quinn
  • APPARATUS AND METHOD FOR BATCH NON-CONTACT MATERIAL CHARACTERIZATION
    Publication number: 20110297076
    Abstract: An apparatus for performing non-contact material characterization includes a wafer carrier adapted to hold a plurality of substrates and a material characterization device, such as a device for performing photoluminescence spectroscopy. The apparatus is adapted to perform non-contact material characterization on at least a portion of the wafer carrier, including the substrates disposed thereon.
    Type: Application
    Filed: August 12, 2011
    Publication date: December 8, 2011
    Applicant: VEECO INSTRUMENTS INC.
    Inventors: Dong Seung Lee, Mikhail Belousov, Eric A. Armour, William E. Quinn
  • APPARATUS AND METHOD FOR BATCH NON-CONTACT MATERIAL CHARACTERIZATION
    Publication number: 20110300645
    Abstract: An apparatus for performing non-contact material characterization includes a wafer carrier adapted to hold a plurality of substrates and a material characterization device, such as a device for performing photoluminescence spectroscopy. The apparatus is adapted to perform non-contact material characterization on at least a portion of the wafer carrier, including the substrates disposed thereon.
    Type: Application
    Filed: August 12, 2011
    Publication date: December 8, 2011
    Applicant: VEECO INSTRUMENTS INC.
    Inventors: Dong Seung Lee, Mikhail Belousov, Eric A. Armour, William E. Quinn
  • Apparatus and method for batch non-contact material characterization
    Patent number: 8022372
    Abstract: An apparatus for performing non-contact material characterization includes a wafer carrier adapted to hold a plurality of substrates and a material characterization device, such as a device for performing photoluminescence spectroscopy. The apparatus is adapted to perform non-contact material characterization on at least a portion of the wafer carrier, including the substrates disposed thereon.
    Type: Grant
    Filed: February 12, 2009
    Date of Patent: September 20, 2011
    Assignee: Veeco Instruments Inc.
    Inventors: Dong Seung Lee, Mikhail Belousov, Eric A. Armour, William E. Quinn
  • Apparatus and Method for Batch Non-Contact Material Characterization
    Publication number: 20090224175
    Abstract: An apparatus for performing non-contact material characterization includes a wafer carrier adapted to hold a plurality of substrates and a material characterization device, such as a device for performing photoluminescence spectroscopy. The apparatus is adapted to perform non-contact material characterization on at least a portion of the wafer carrier, including the substrates disposed thereon.
    Type: Application
    Filed: February 12, 2009
    Publication date: September 10, 2009
    Applicant: VEECO INSTRUMENTS INC.
    Inventors: Dong Seung Lee, Mikhail Belousov, Eric A. Armour, William E. Quinn