Abstract: A substrate processing apparatus includes a table in an exposure chamber that is configured to perform an exposure process on a semiconductor substrate, a guiding device including a first horizontal driving body slidably movable in a first horizontal direction and a guide rail on the first horizontal driving body and having a trench extending in a second horizontal direction, a positioning device connected to the guiding device, the positioning device including a slider, a second horizontal driving body and a substrate stage, the slider configured to slidably move in the second horizontal direction along the trench, the second horizontal driving body connected or fixed to the slider, the substrate stage on the second horizontal driving body and configured to support the semiconductor substrate, and a blocking member between the guide rail and the substrate stage to block an inflow of foreign substances onto the substrate stage.

Abstract: A search site user connection system and method using search words are provided. The search site user connection method according to the present invention includes storing at least one first search word input to a search window of a search site by a first user, order in which the first search words have been input, and information of the first user together as one piece of search information; inputting, by a second user, at least one second search word to the search window of the search site; comparing the first search words with the second search words to determine whether the first search words and the second search words match; displaying information for the first user when one or more of the first search words and the second search words match; and connecting the first user selected by the second user with the second user.