Abstract: A substrate processing method is provided. The substrate processing method comprises loading a substrate onto a substrate support inside a chamber, forming a plasma inside the chamber, providing a first DC pulse signal to an electromagnet that generates a magnetic field inside the chamber and processing the substrate with the plasma, wherein the first DC pulse signal is repeated at a first period including a first section and a second section subsequent to the first section, the first DC pulse signal has a first level during the first section, and the first DC pulse signal has a second level different from the first level during the second section.

Abstract: A method and system of controlling driving of a brushless DC electric motor (BLDC) of an electric water pump are provided. The method includes estimating an initial position of a rotor using a magnitude of a current detected in a three-phase coil wound on a stator and converting a current magnitude that reflects a rotational angle of the rotor with respect to the initial position into two direct currents based on the three-phase current. The converted direct currents are output and a rotational angle, a speed, a flux and a torque of the rotor are acquired based on values of the three-phase current, a voltage generated according to flow of the three-phase current, a predetermined coil resistance, and an inductance input. A speed of the motor is then adjusted based on the acquired rotational angle, speed, flux, and torque of the rotor.

Abstract: A method and system of controlling driving of a brushless DC electric motor (BLDC) of an electric water pump are provided. The method includes estimating an initial position of a rotor using a magnitude of a current detected in a three-phase coil wound on a stator and converting a current magnitude that reflects a rotational angle of the rotor with respect to the initial position into two direct currents based on the three-phase current. The converted direct currents are output and a rotational angle, a speed, a flux and a torque of the rotor are acquired based on values of the three-phase current, a voltage generated according to flow of the three-phase current, a predetermined coil resistance, and an inductance input. A speed of the motor is then adjusted based on the acquired rotational angle, speed, flux, and torque of the rotor.

Abstract: A method and a system for controlling a motor are provided to allow for a limp home function when an error occurs in a Hall effect sensor that detects the position of a rotor while operating a motor used for an automotive electric water pump. The method includes determining an output error of a Hall effect sensor and stopping adjustment a speed of the motor based on output of the Hall effect sensor, in response to detecting an output error of the Hall effect sensor. Additionally, the method includes adjusting the speed of the motor based on a counter electromotive force generated by a plurality of stator coils having different phases in the motor.

Abstract: A method and a system for controlling a motor are provided to allow for a limp home function when an error occurs in a Hall effect sensor that detects the position of a rotor while operating a motor used for an automotive electric water pump. The method includes determining an output error of a Hall effect sensor and stopping adjustment a speed of the motor based on output of the Hall effect sensor, in response to detecting an output error of the Hall effect sensor. Additionally, the method includes adjusting the speed of the motor based on a counter electromotive force generated by a plurality of stator coils having different phases in the motor.

Abstract: A failsafe device for a vehicle is provided that includes a transmission of a vehicle and a controller configured to operate an oil supply unit and an emergency oil supply unit. The oil supply unit supplies oil to the transmission via a first oil channel and produces hydraulic pressure and the emergency oil supply unit supplies oil to the transmission via a second oil channel and produces the hydraulic pressure when an oil supply system fails.

Abstract: A failsafe device for a vehicle is provided that includes a transmission of a vehicle and a controller configured to operate an oil supply unit and an emergency oil supply unit. The oil supply unit supplies oil to the transmission via a first oil channel and produces hydraulic pressure and the emergency oil supply unit supplies oil to the transmission via a second oil channel and produces the hydraulic pressure when an oil supply system fails.

Abstract: A hybrid electric vehicle having a brake operated by compressed air, and a system and method for controlling the idling stop of a hybrid electric vehicle in which, when the vehicle idling-stops on a slope having a predetermined angle, the idling stop is allowed only when the pressure of compressed air within an air tank is higher than a predetermined pressure in the state in which the tilt angle of the current slope is less than a predetermined angle, thereby preventing accidents due to the vehicle being pushed forwards or backwards.

Abstract: A hybrid electric vehicle having a brake operated by compressed air, and a system and method for controlling the idling stop of a hybrid electric vehicle in which, when the vehicle idling-stops on a slope having a predetermined angle, the idling stop is allowed only when the pressure of compressed air within an air tank is higher than a predetermined pressure in the state in which the tilt angle of the current slope is less than a predetermined angle, thereby preventing accidents due to the vehicle being pushed forwards or backwards.

Abstract: Disclosed herein is a blasting apparatus for forming horizontal underground cavities and blasting method using the same. The blasting apparatus includes a metallic body horizontally formed through the center portion of a loading chamber. A delayed detonator and a shaped explosive are loaded in the loading chamber of the body. A connecting ring is formed on the body for connecting the body to a hoisting rope. The blasting method includes the step of loading a detonator lead, a delayed detonator and a shaped explosive in a loading chamber. The blasting apparatus is suspended over a vertical pit by operating a hoisting device. The blasting apparatus suspended by the hoisting rope is lowered to the entrance of a vertical pit, and a detonator lead drawn out of the body is connected to a leading wire. The blasting apparatus and the leading wire connected to the detonator lead drawn out of the body are lowered into the vertical pit at a position where fluid discharges.

Abstract: Disclosed herein is a center-cut blasting method for tunnel excavation. The center-cut blasting method includes the step of drilling a single central center-cut hole at the center of a center-cut region, drilling a plurality of auxiliary center-cut holes comprised of large unloaded auxiliary holes and loaded auxiliary holes that are alternately arranged around the central center-cut hole to be situated in a circle having a predetermined diameter, and drilling a plurality of spreader center-cut holes outside the auxiliary center-cut holes to be situated in concentric circles centered by the central center-cut hole. Thereafter, the center-cut holes are loaded with delay detonators and explosives and the center-cut holes are stemmed with stemming material at their entrances. The loaded auxiliary holes of the auxiliary center-cut holes are blasted so as to create a circular pre-split. After that, the central center-cut hole is blasted so as to create initial dual free surfaces.

Abstract: Disclosed herein is a blasting apparatus for forming horizontal underground cavities and blasting method using the same. The blasting apparatus includes a metallic body horizontally formed through the center portion of a loading chamber. A delayed detonator and a shaped explosive are loaded in the loading chamber of the body. A connecting ring is formed on the body for connecting the body to a hoisting rope. The blasting method includes the step of loading a detonator lead, a delayed detonator and a shaped explosive in a loading chamber. The blasting apparatus is suspended over a vertical pit by operating a hoisting device. The blasting apparatus suspended by the hoisting rope is lowered to the entrance of a vertical pit, and a detonator lead drawn out of the body is connected to a leading wire. The blasting apparatus and the leading wire connected to the detonator lead drawn out of the body are lowered into the vertical pit at a position where fluid discharges.

Abstract: Disclosed herein is a center-cut blasting method for tunnel excavation. The center-cut blasting method includes the step of drilling a single central center-cut hole at the center of a center-cut region, drilling a plurality of auxiliary center-cut holes comprised of large unloaded auxiliary holes and loaded auxiliary holes that are alternately arranged around the central center-cut hole to be situated in a circle having a predetermined diameter, and drilling a plurality of spreader center-cut holes outside the auxiliary center-cut holes to be situated in concentric circles centered by the central center-cut hole. Thereafter, the center-cut holes are loaded with delay detonators and explosives and the center-cut holes are stemmed with stemming material at their entrances. The loaded auxiliary holes of the auxiliary center-cut holes are blasted so as to create a circular pre-split. After that, the central center-cut hole is blasted so as to create initial dual free surfaces.