Abstract: A substrate processing apparatus using plasma capable of efficiently controlling the selectivity ratio of a silicon layer and an oxide layer is provided. The substrate processing apparatus comprises a first space disposed between an electrode and an ion blocker; a second space disposed between the ion blocker and a shower head; a processing space under the shower head for processing a substrate; a first supply hole for providing a first gas for generating plasma to the first space; a second supply hole for providing a second gas to be mixed with an effluent of the plasma to the second space; and a first coating layer formed on a first surface of the shower head facing the second space, not formed on a second surface of the shower head facing the processing space, and containing nickel.

Abstract: Disclosed is a negative electrode, including: a negative electrode current collector; and a negative electrode active material layer disposed on at least one surface of the negative electrode current collector, and having a lower layer region containing a first active material and a first binder polymer, and an upper layer region disposed on the lower layer region and containing a second active material and a second binder polymer, wherein the first active material includes primary particles of artificial graphite, the second active material includes secondary particles of artificial graphite and a carbon coating layer disposed on the secondary particles, and the weight percentage (wt %) of the first binder polymer in the lower layer region is larger than the weight percentage (wt %) of the second binder polymer in the upper layer region. Also disclosed are a method for manufacturing the negative electrode and a lithium secondary battery including the negative electrode.

Abstract: Disclosed are an outer ring for an oil pump having an increased number and size of open pores in a surface of a molded article and a method for manufacturing the outer ring.

Abstract: A secondary battery includes a case having a cylindrical shape, an electrode assembly accommodated in the case and including first tabs protruding in a first direction and second tabs protruding in the first direction, a first current collector plate accommodated in the case and connected to the first tabs, a second current collector plate configured to connect the second tabs to the case, a rivet terminal connected to the first current collector plate and passing through the case, and an insulating member in contact with a perimeter of each of the electrode assembly, the first current collector plate, and the second current collector plate.

Abstract: The present disclosure provides a secondary battery including a case having a cylindrical shape, an electrode assembly in the case, and including a first tab protruding in a first direction at a center portion, and a second tab protruding in the first direction at a perimeter, a first current collector plate in the case and electrically connected to the first tab, a second current collector plate electrically connecting the second tab to the case, and a rivet terminal electrically connected to the first current collector plate, and passing through the case.

Abstract: An apparatus for treating a substrate includes a process chamber having an inner space, a support unit supporting a substrate in the inner space, a processing gas supply unit for supplying a processing gas to the inner space, and a plasma source that excites the processing gas in a plasma state in the inner space. The processing gas supply unit includes a heater that heats the processing gas.

Abstract: A substrate treating apparatus and a substrate treating system including the same are disclosed, in which the number of heat treatment chambers such as anneal chambers may be varied. The substrate treating apparatus includes a first chamber heat-treating a substrate; and a second chamber treating the substrate in another way different from heat-treatment, wherein the number of the first chambers is varied depending on the number of the second chambers that need heat treatment for the substrate.

Abstract: A method for processing a substrate includes providing the substrate, a film being formed on the substrate, performing pretreatment to surface-treat the film formed on the substrate using a treatment gas in a plasma state, and performing, after the pretreatment, liquid treatment to remove the film from the substrate by supplying a treatment liquid onto the substrate.

Abstract: Disclosed is a negative electrode, including: a negative electrode current collector; and a negative electrode active material layer disposed on at least one surface of the negative electrode current collector, and having a lower layer region containing a first active material and a first binder polymer, and an upper layer region disposed on the lower layer region and containing a second active material and a second binder polymer, wherein the first active material includes primary particles of artificial graphite, the second active material includes secondary particles of artificial graphite and a carbon coating layer disposed on the secondary particles, and the weight percentage (wt %) of the first binder polymer in the lower layer region is larger than the weight percentage (wt %) of the second binder polymer in the upper layer region. Also disclosed are a method for manufacturing the negative electrode and a lithium secondary battery including the negative electrode.

Abstract: A cylindrical secondary battery includes: an electrode assembly including a positive electrode plate having a positive electrode multi-tab, a separator, and a negative electrode plate having a negative electrode multi-tab, the positive electrode plate, the separator, and the negative electrode plate being laminated and wound; a cylindrical can accommodating the electrode assembly; a cap plate coupled at an upper end of the cylindrical can and being electrically connected to the negative electrode multi-tab; and a positive electrode terminal protruding upwardly through the cap plate and being electrically connected to the positive electrode multi-tab.

Abstract: A processing apparatus for a base material tab protruding from a cylindrical electrode assembly includes: a vertical plate arranged in a second direction perpendicular to a first direction, the first direction being a longitudinal direction of the electrode assembly; a rotatable plate that is a planar plate arranged parallel to the vertical plate and coupled to be rotatable relative to the vertical plate; and a plurality of blades coupled between the vertical plate and the rotatable plate. The blades together form a variable diameter central area defined by ends of the blades according to the relative rotation of the rotatable plate to process the base material tab of the electrode assembly.

Abstract: Disclosed are a method of forming a pattern structure including a silicon nitride. According to the embodiment of the present disclosure, the method of forming a pattern structure includes a step of providing, into a substrate processing apparatus, a substrate having one surface on which a pattern structure including a recess region in which an opening periphery portion and a bottom portion are made of a first silicon nitride is formed, a deposition step of depositing a second silicon nitride on the first silicon nitride, an etching step of etching the second silicon nitride, and a step of performing steps in one cycle n times until the first silicon nitride constituting the bottom portion is removed.

Abstract: A winding member, including a winding core for an electrode assembly, winding a positive electrode plate, a negative electrode plate, and a first separator, the winding core including a pair of clamps extending along a longitudinal direction of the winding core a base portion coupled to a first and second end of each of the clamps the clamps being spaced apart from each other vertically around an insertion groove, the clamps including a first clamp and a second clamp extending along the longitudinal direction the first clamp including a pair of protrusions protruding in the direction of the second clamp on an inner surface of the first clamp, and at least one of the pair of protrusions fixing a winding-front end of the first separator inserted into the insertion groove to an inner surface of the second clamp.

Abstract: A secondary battery includes: a can having an accommodation space therein; an electrode assembly accommodated in the accommodation space in the can; and a cap assembly sealed with the can. The can has a beading part recessed into a side wall of the can at a region below where the cap assembly is accommodated, and the beading part has an acute angle with respect to the side wall of the can.

Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes an electrode plate applied with a power; an ion blocker positioned at a bottom side of the electrode plate, which has a plurality of top holes formed thereon, and which is grounded; a shower head positioned at a bottom side of the ion blocker and which has a plurality of bottom holes formed thereon; and a turbulence generating unit configured to have a turbulence space therein, and which is positioned at a space between the ion blocker and the shower head, and wherein the top hole is positioned to overlap the turbulence space when seen from above, and the bottom hole is positioned at an outer side of the turbulence space, and which faces at least one of a bottom surface of the ion blocker and an outer wall of the turbulence generating unit when seen from below.

Abstract: Disclosed are an outer ring for an oil pump having an increased number and size of open pores in a surface of a molded article and a method for manufacturing the outer ring.

Abstract: A cylindrical secondary battery and a manufacturing method of a secondary battery are provided. A manufacturing method of a cylindrical secondary battery includes: winding an electrode assembly to expose a first electrode uncoated portion and a second electrode uncoated portion to opposite ends in a longitudinal direction; bending at least some portions of the first electrode uncoated portion and the second electrode uncoated portion of the electrode assembly in a direction by pressing the first electrode uncoated portion and the second electrode uncoated portion; welding electrode collector plates to ends of the bent first and second electrode uncoated portions; and inserting and sealing the electrode assembly into a cylindrical case.

Abstract: The present disclosure relates to mobile devices for analyzing a chemical composition, and related methods of analyzing a chemical composition. A benefit of embodiments disclosed herein can include portable and economical devices providing for simple and rapid analysis of luminescent chemical sensor arrays. A benefit of methods disclosed herein can include the use of embodied devices to provide highly accurate qualitative and quantitative analyses of the components of a broad range of chemical compositions. A benefit of the methods disclosed herein can include the rapid, simple, and accurate analysis of trace chemicals present in chemical compositions.

Abstract: Disclosed are an outer ring for an oil pump having an increased number and size of open pores in a surface of a molded article and a method for manufacturing the outer ring.

Abstract: A substrate processing apparatus and method capable of maximizing plasma uniformity are provided.