Abstract: A refrigerator includes a cabinet, a cooling module including a compressor, a condenser, an expansion valve, and an evaporator, and attachable to or detachable from the cabinet so that the cooling module is removably mounted to the cabinet, an electronic device arranged in the cabinet, and an electrical box configured to be electrically connected to the electronic device and the compressor, receive power from outside and supply the received power to the electronic device and the compressor.

Abstract: Provided is a refrigerator. The refrigerator includes: a cabinet forming a storage chamber therein and including a cooling module mounting portion, a cabinet sealing portion formed on an outer surface of the cooling module mounting portion; a cooling module detachably mounted to the cooling module mounting portion and including an evaporator, a condenser, and a compressor, wherein the cooling module includes a module housing, and the module housing includes a module sealing portion facing the cabinet sealing portion, and the module sealing portion includes a module inclination portion positioned at an inclination with respect to a direction in which the cooling module is insertable into the cabinet to be mounted to the cabinet; and a sealing member positioned between the cabinet sealing portion and the module sealing portion.

Abstract: The refrigerator includes a main body having a storage room, a door for opening and closing the storage room, and a camera device having a plurality of cameras for photographing the storage room and mounted on the inner surface of the door. The state of the storage room can be checked without opening the door by the camera device.

Abstract: Provided herein is a refrigerator with an improved coupling structure of a heat dissipation duct for dissipating heat generated in a display unit and having and applying the improved heat dissipation duct to a door having a thin thickness such that a problem in which a curve is generated at an exterior of a door when an inside of the door is filled with a heat insulating material is prevented. The refrigerator includes a main body, and a door, wherein the door includes a door cap coupled to at least one of an upper portion and a lower portion of the door, a display unit provided at a front surface of the door, a heat dissipation cover arranged behind the display unit, and a heat dissipation duct slidably inserted into the door through the at least one of the upper portion and the lower portion of the door.

Abstract: A refrigerator includes a cabinet, a cooling module including a compressor, a condenser, an expansion valve, and an evaporator, and attachable to or detachable from the cabinet so that the cooling module is removably mounted to the cabinet, an electronic device arranged in the cabinet, and an electrical box configured to be electrically connected to the electronic device and the compressor, receive power from outside and supply the received power to the electronic device and the compressor.

Abstract: Provided is a refrigerator. The refrigerator includes: a cabinet forming a storage chamber therein and including a cooling module mounting portion, a cabinet sealing portion formed on an outer surface of the cooling module mounting portion; a cooling module detachably mounted to the cooling module mounting portion and including an evaporator, a condenser, and a compressor, wherein the cooling module includes a module housing, and the module housing includes a module sealing portion facing the cabinet sealing portion, and the module sealing portion includes a module inclination portion positioned at an inclination with respect to a direction in which the cooling module is insertable into the cabinet to be mounted to the cabinet; and a sealing member positioned between the cabinet sealing portion and the module sealing portion.

Abstract: The refrigerator includes a main body having a storage room, a door for opening and closing the storage room, and a camera device having a plurality of cameras for photographing the storage room and mounted on the inner surface of the door. The state of the storage room can be checked without opening the door by the camera device.

Abstract: Provided herein is a refrigerator with an improved coupling structure of a heat dissipation duct for dissipating heat generated in a display unit and having and applying the improved heat dissipation duct to a door having a thin thickness such that a problem in which a curve is generated at an exterior of a door when an inside of the door is filled with a heat insulating material is prevented. The refrigerator includes a main body, and a door, wherein the door includes a door cap coupled to at least one of an upper portion and a lower portion of the door, a display unit provided at a front surface of the door, a heat dissipation cover arranged behind the display unit, and a heat dissipation duct slidably inserted into the door through the at least one of the upper portion and the lower portion of the door.

Abstract: Provided herein is a refrigerator with an improved coupling structure of a heat dissipation duct for dissipating heat generated in a display unit and having and applying the improved heat dissipation duct to a door having a thin thickness such that a problem in which a curve is generated at an exterior of a door when an inside of the door is filled with a heat insulating material is prevented. The refrigerator includes a main body, and a door, wherein the door includes a door cap coupled to at least one of an upper portion and a lower portion of the door, a display unit provided at a front surface of the door, a heat dissipation cover arranged behind the display unit, and a heat dissipation duct slidably inserted into the door through the at least one of the upper portion and the lower portion of the door.

Abstract: Provided herein is a refrigerator with an improved coupling structure of a heat dissipation duct for dissipating heat generated in a display unit and having and applying the improved heat dissipation duct to a door having a thin thickness such that a problem in which a curve is generated at an exterior of a door when an inside of the door is filled with a heat insulating material is prevented. The refrigerator includes a main body, and a door, wherein the door includes a door cap coupled to at least one of an upper portion and a lower portion of the door, a display unit provided at a front surface of the door, a heat dissipation cover arranged behind the display unit, and a heat dissipation duct slidably inserted into the door through the at least one of the upper portion and the lower portion of the door.

Abstract: A method for a multiple-stage microwave plasma cleaning technique for efficiently cleaning a substrate processing chamber. In a specific embodiment, a two-stage cleaning process is described. The first stage begins by flowing a reactive gas from a gas source into a processing chamber where microwaves ignite and maintain a plasma from the reactive gas. Reactive radicals generated which react with residues on the interior surfaces of the processing chamber. In the second stage, an inert gas is flowed into the processing chamber in addition to the reactive gas. Microwaves then ignite and maintain a plasma from the reactive gas and optionally, the inert gas as well. Optionally, an inert gas can be flowed into the processing chamber prior to the first stage to remove loose particles from the processing chamber. The reactive gas in such embodiments is preferably NF.sub.3, but other fluorine-containing gases such as carbon tetrafluoride (CF.sub.4) or sulfur hexafluoride (SF.sub.6) may also be used.