Abstract: A gripping device connected to a vehicle for transporting items to be transported in a semiconductor manufacturing plant, includes: a base unit provided on the vehicle to be movable up and down; and a hand unit provided on the base unit and having an adjustable spacing to either secure or release the items, wherein the hand unit includes: motors; a conversion module converting the rotational motion of the motors into linear motion; and grippers connected to the conversion module, with their spacing adjusted in conjunction with the conversion module.

Abstract: Provided is a transport system to facilitate interlayer movement of a transported object. The transport system comprises: a rail device; and a transport vehicle moving in the rail device, wherein the rail device comprises: a first rail with a first inclination angle; a second rail with a second inclination angle larger than the first inclination angle; a first connection rail configured to connect the first rail to the second rail; and a rack rail installed along the first connection rail and the second rail, wherein the transport vehicle comprises: a frame; a driving wheel connected to the frame and moving the first rail, the first connection rail and the second rail; and a pinion gear connected to the frame and moving along the rack rail.

Abstract: A touch detection device includes a panel including a plurality of electrodes regularly arranged in rows and columns, a connector configured to electrically connect some of the electrodes to form a plurality of sensing channels, and a driver configured to provide driving signals to the sensing channels, wherein the driver parts different edges of the driving signals to different sensing channels.

Abstract: The robot joint structure includes a first body, a second body disposed to be spaced apart from the first body, a first joint configured to connect the first body and the second body, and a second joint disposed to face the first joint and configured to connect the first body and the second body. The first joint includes a first connector and a second connector that cross each other and the second joint includes a third connector and a fourth connector that cross each other.

Abstract: Provided is a transport system to facilitate interlayer movement of a transported object. The transport system comprises: a rail device; and a transport vehicle moving in the rail device, wherein the rail device comprises: a first rail with a first inclination angle; a second rail with a second inclination angle larger than the first inclination angle; a first connection rail configured to connect the first rail to the second rail; and a rack rail installed along the first connection rail and the second rail, wherein the transport vehicle comprises: a frame; a driving wheel connected to the frame and moving the first rail, the first connection rail and the second rail; and a pinion gear connected to the frame and moving along the rack rail.

Abstract: A device for gripping an object includes a pair of grippers each having a gripping surface formed with a plurality of fine channels, a driver for driving the pair of grippers, a pump connected to at least one of the plurality of fine channels, to supply a fluid to the at least one of the plurality of fine channels, and a controller for controlling the driver to enable the pair of grippers to grip the object or controlling the pump to adjust an amount of the fluid supplied to the gripping surface.

Abstract: A linear variable differential transformer includes: a moving portion having a shape extending in a direction of an axial line; a bobbin including a through hole formed such that the moving portion is movable in the direction of the axial line, an outer circumferential surface of the bobbin having a shape inclined symmetrically with respect to a center line thereof based on the direction of the axial line; a primary coil wound around the outer circumferential surface of the bobbin; and a secondary coil wound around the wound primary coil, a wound outer surface of the secondary coil having a shape parallel to the axial line.

Abstract: Disclosed is a robot joint structure. The robot joint structure includes a first body, a second body disposed to be spaced apart from the first body, a first joint configured to connect the first body and the second body, and a second joint disposed to face the first joint and configured to connect the first body and the second body, wherein the first joint includes a first connector and a second connector that cross each other and the second joint includes a third connector and a fourth connector that cross each other.

Abstract: A passive compliance gripper includes a passive compliance part, a displacement measuring element and a gripper mount. A first end of the passive compliance part is fixed, and a second end of the passive compliance part is configured to be transformed. The displacement measuring element is equipped to the passive compliance part, and measures displacement due to transformation of the passive compliance part. The gripper mount is connected to the second end of the passive compliance part, and has a gripper part gripping a component.

Abstract: A device for gripping an object includes a pair of grippers each having a gripping surface formed with a plurality of fine channels, a driver for driving the pair of grippers, a pump connected to at least one of the plurality of fine channels, to supply a fluid to the at least one of the plurality of fine channels, and a controller for controlling the driver to enable the pair of grippers to grip the object or controlling the pump to adjust an amount of the fluid supplied to the gripping surface.

Abstract: A present disclosure relates to a shape compliant electroadhesive gripper for picking up atypical objects having various shapes, sizes, and materials, and a shape compliant electroadhesive gripper according to one embodiment of the present disclosure includes a body, a shape compliant module disposed on the body, rigidity of the shape compliant modules being variably controllable, and an electroadhesive module disposed on the shape compliant module.

Abstract: A linear variable differential transformer includes: a moving portion having a shape extending in a direction of an axial line; a bobbin including a through hole formed such that the moving portion is movable in the direction of the axial line, an outer circumferential surface of the bobbin having a shape inclined symmetrically with respect to a center line thereof based on the direction of the axial line; a primary coil wound around the outer circumferential surface of the bobbin; and a secondary coil wound around the wound primary coil, a wound outer surface of the secondary coil having a shape parallel to the axial line.

Abstract: Disclosed herein is a shape compliant electroadhesive gripper for picking up an atypical object. The shape compliant electroadhesive gripper comprises a body, and an electroadhesive module disposed on the body and including an electrorheological elastomer, wherein, when a voltage is not applied, a shape of the electroadhesive module is deformed according to a shape of an external object coming into contact with the electroadhesive module, and when the voltage is applied, rigidity of the electrorheological elastomer is increased to maintain the shape of the electroadhesive module, and when the voltage is applied to the electroadhesive module, electroadhesion is made due to an electrostatic force generated between the electrorheological elastomer and the adjacent external object.

Abstract: A dual frequency power-driven inductively coupled plasma torch according to an exemplary embodiment of the present invention includes: a hollow confinement tube provided with a space in which thermal plasma is formed; an induction coil that surrounds the confinement tube; and a power supply source that supplies power to the induction coil, wherein the power supply source may supply at least two powers having different frequencies to the induction coil.

Abstract: Disclosed herein is a shape compliant electroadhesive gripper for picking up an atypical object. The shape compliant electroadhesive gripper comprises a body, and an electroadhesive module disposed on the body and including an electrorheological elastomer, wherein, when a voltage is not applied, a shape of the electroadhesive module is deformed according to a shape of an external object coming into contact with the electroadhesive module, and when the voltage is applied, rigidity of the electrorheological elastomer is increased to maintain the shape of the electroadhesive module, and when the voltage is applied to the electroadhesive module, electroadhesion is made due to an electrostatic force generated between the electrorheological elastomer and the adjacent external object.

Abstract: A present disclosure relates to a shape compliant electroadhesive gripper for picking up atypical objects having various shapes, sizes, and materials, and a shape compliant electroadhesive gripper according to one embodiment of the present disclosure includes a body, a shape compliant module disposed on the body, rigidity of the shape compliant modules being variably controllable, and an electroadhesive module disposed on the shape compliant module.

Abstract: A passive compliance gripper includes a passive compliance part, a displacement measuring element and a gripper mount. A first end of the passive compliance part is fixed, and a second end of the passive compliance part is configured to be transformed. The displacement measuring element is equipped to the passive compliance part, and measures displacement due to transformation of the passive compliance part. The gripper mount is connected to the second end of the passive compliance part, and has a gripper part gripping a component.

Abstract: A dual frequency power-driven inductively coupled plasma torch according to an exemplary embodiment of the present invention includes: a hollow confinement tube provided with a space in which thermal plasma is formed; an induction coil that surrounds the confinement tube; and a power supply source that supplies power to the induction coil, wherein the power supply source may supply at least two powers having different frequencies to the induction coil.

Abstract: Disclosed is a magnetic bearing structure including a permanent magnet, levitating a rotation body without a bias current, and easily magnetizing the permanent magnet. The magnetic bearing structure includes a ring-shaped permanent magnet provided on a side of a rotation shaft and magnetized in a direction parallel with a shaft direction of the rotation shaft, a coil installed on a side of the permanent magnet, and a conductor installed on an external side of the coil and used to form a magnetic field path. According to the configuration, when an additional bias current is not supplied to the coil installed in the magnetic bearing, a rotation body levitates according to the magnetic field caused by the permanent magnet, and a magnetized direction of the permanent magnet is in parallel with a shaft direction of the rotation shaft thereby allowing easy magnetization and increasing productivity of the magnetic bearing.

Abstract: Disclosed is a magnetic bearing structure including a permanent magnet, levitating a rotation body without a bias current, and easily magnetizing the permanent magnet. The magnetic bearing structure includes a ring-shaped permanent magnet provided on a side of a rotation shaft and magnetized in a direction parallel with a shaft direction of the rotation shaft, a coil installed on a side of the permanent magnet, and a conductor installed on an external side of the coil and used to form a magnetic field path. According to the configuration, when an additional bias current is not supplied to the coil installed in the magnetic bearing, a rotation body levitates according to the magnetic field caused by the permanent magnet, and a magnetized direction of the permanent magnet is in parallel with a shaft direction of the rotation shaft thereby allowing easy magnetization and increasing productivity of the magnetic bearing.