Patents by Inventor Dong-Xuan Lu

Dong-Xuan Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of spin-on wafer cleaning
    Patent number: 7611589
    Abstract: A method for spin-on wafer cleaning. The method comprises controlling spin speed and vertical water jet pressure. The vertical jet pressure and the spin speed are substantially maintained in inverse proportion. Wafer spin speed is between 50 to 1200 rpm. Vertical wafer jet pressure is between 0.05 to 100 KPa.
    Type: Grant
    Filed: March 4, 2005
    Date of Patent: November 3, 2009
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jun Wu, Dong-Xuan Lu, Shih-Chi Lin, Wen-Long Lee, Yi-An Jian, Guang-Cheng Wang, Shiu-Ko JangJian, Chyi-Tsong Ni, Szu-An Wu, Ying-Lang Wang
  • Methods of spin-on wafer cleaning
    Publication number: 20060196526
    Abstract: A method for spin-on wafer cleaning. The method comprises controlling spin speed and vertical water jet pressure. The vertical jet pressure and the spin speed are substantially maintained in inverse proportion. Wafer spin speed is between 50 to 1200 rpm. Vertical wafer jet pressure is between 0.05 to 100 KPa.
    Type: Application
    Filed: March 4, 2005
    Publication date: September 7, 2006
    Inventors: Jun Wu, Dong-Xuan Lu, Shih-Chi Lin, Wen-Long Lee, Yi-An Jian, Guang-Cheng Wang, Shiu-Ko JangJian, Chyi-Tsong Ni, Szu-An Wu, Ying-Lang Wang