Patents by Inventor Dongbin CAI

Dongbin CAI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • BEAM MANIPULATOR IN CHARGED PARTICLE-BEAM EXPOSURE APPARATUS
    Publication number: 20230124558
    Abstract: An improved electron beam manipulator for manipulating an electron beam in an electron projection system and a method for manufacturing thereof are disclosed. The electron beam manipulator comprises a body having a first surface and a second surface opposing to the first surface and an interconnecting surface extending between the first surface and the second surface and forming an aperture through the body. The body comprises an electrode forming at least part of the interconnecting surface between the first surface and the second surface.
    Type: Application
    Filed: February 24, 2021
    Publication date: April 20, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Johannes Cornelis Jacobus DE LANGEN, Dmitry MUDRETSOV, Dongbin CAI