Patents by Inventor Dong-Bock Lee

Dong-Bock Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MOTOR CONTROL DEVICE AND METHOD FOR SEMICONDUCTOR PROCESS EQUIPMENT
    Publication number: 20250175106
    Abstract: Disclosed are a motor control device and method for semiconductor process equipment, more particularly a motor control technology for semiconductor process equipment capable of applying a line drive type signal processing technique to determine an error of an operation signal of a motor and compensating for the error to perform sensorless control of the motor.
    Type: Application
    Filed: November 27, 2024
    Publication date: May 29, 2025
    Applicants: SEMES CO., LTD., IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
    Inventors: Chan Young CHOI, Dong Bock LEE, Dae Hee WON, Ju LEE, In Yeol YUN, Hyun Woo KIM, Jung Ho AHN
  • Chamber structure in inductive coupling plasma etching apparatus
    Publication number: 20040097087
    Abstract: A chamber structure of an inductive coupling plasma etching apparatus includes an etch chamber for an etching process; a plasma chamber for generating plasma; and a segregation wall part having a portion within the etch chamber made of ceramic material and a portion within the plasma chamber made of quartz material, whereby the segregation wall part separates the etch chamber from the plasma chamber.
    Type: Application
    Filed: October 31, 2003
    Publication date: May 20, 2004
    Inventor: Dong-Bock Lee