Patents by Inventor Dong-Bock Lee

Dong-Bock Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chamber structure in inductive coupling plasma etching apparatus
    Publication number: 20040097087
    Abstract: A chamber structure of an inductive coupling plasma etching apparatus includes an etch chamber for an etching process; a plasma chamber for generating plasma; and a segregation wall part having a portion within the etch chamber made of ceramic material and a portion within the plasma chamber made of quartz material, whereby the segregation wall part separates the etch chamber from the plasma chamber.
    Type: Application
    Filed: October 31, 2003
    Publication date: May 20, 2004
    Inventor: Dong-Bock Lee