Abstract: A MEMS gas sensor (A) and array (B) thereof, a gas detection and preparation method. The gas sensor (A) comprises a first substrate (A2) with a cavity (A1) provided in a first surface, and a gas detection assembly (A3) arranged at an opening of the cavity The gas detection assembly comprises: a supporting suspension bridge (A31) erected on the opening of the cavity, and a gas detection part (A32) arranged on the supporting suspension bridge. The gas detection part comprises a strip-shaped heating electrode part (A321), an insulating layer (A322), a strip-shaped detection electrode part (A323) and a gas-sensitive material part (A324), which are sequentially stacked. The strip-shaped detection electrode part comprises a first detection electrode part (A323-1) and a second detection electrode part (A323-2), with a first opening (A325) provided between the A323-1 and A323-2; the gas-sensitive material part is arranged at the position of the first opening.

Abstract: A MEMS gas sensor (A), array thereof, and preparation method therefor. The MEMS gas sensor comprises a first substrate (A2) provided with a first cavity (A1), and N gas detection assemblies (A3) provided at an opening of A1, each A3 comprises: a supporting arm (A31) and a gas detection part (A32) provided on the A31; the A32 comprises a strip-shaped heating electrode part (A321), an insulating layer (A322), a strip-shaped detection electrode part (A323), and a gas-sensitive material part (A324) that are stacked sequentially; the A323 comprises a first detection electrode part (A323-1) and a second detection electrode part (A323-2) with a first opening (A325) therebetween; the A324 is provided at the A325; a first end of the A324 is connected to the A323-1, a second end of the A324 is connected to the A323-2; strip-shaped heating electrode parts in each A3 are connected sequentially to form a heater (A8).

Abstract: A single cantilever gas sensor includes a silicon substrate, a supporting film, a heating resistor, a isolation film, and a detecting electrode, which are successively stacked. The gas sensor is T-shaped and has a base structure and a cantilever structure The end portion of the cantilever structure is provided with a gas sensitive material. The present invention further provides a sensor array composed of the single cantilever gas sensors and a method for manufacturing the gas sensor. The method includes (1) selecting a silicon substrate; (2) preparing a supporting film; (3) preparing a heating resistor; (4) preparing an isolation film; (5) preparing a detecting electrode; (6) releasing a membrane; (7) loading a gas sensitive material.

Abstract: A single cantilever gas sensor includes a silicon substrate, a supporting film, a heating resistor, a isolation film, and a detecting electrode, which are successively stacked. The gas sensor is T-shaped and has a base structure and a cantilever structure The end portion of the cantilever structure is provided with a gas sensitive material. The present invention further provides a sensor array composed of the single cantilever gas sensors and a method for manufacturing the gas sensor. The method includes (1) selecting a silicon substrate; (2) preparing a supporting film; (3) preparing a heating resistor; (4) preparing an isolation film; (5) preparing a detecting electrode; (6) releasing a membrane; (7) loading a gas sensitive material.

Abstract: A gas sensor includes a silicon substrate, a detecting electrode, a first isolation film, a heating resistor, and a second isolation film that are successively stacked. The gas sensor has a base structure and a cantilever structure with a curled free end, and a gas sensitive material is provided on the end of the cantilever structure. A sensor array composed of the gas sensor, and a method for manufacturing the gas sensor are also provided. The method includes (1) selecting a sacrificial layer; (2) preparing a detecting electrode; (3) preparing a first isolation film; (4) preparing a heating resistor; (5) preparing a second isolation film; (6) releasing the membrane; and (7) loading the gas sensitive material.

Abstract: A gas sensor includes a silicon substrate, a detecting electrode, a first isolation film, a heating resistor, and a second isolation film that are successively stacked. The gas sensor has a base structure and a cantilever structure with a curled free end, and a gassensitive material is provided on the end of the cantilever structure. A sensor array composed of the gas sensor, and a method for manufacturing the gas sensor are also provided. The method includes (1) selecting a sacrificial layer; (2) preparing a detecting electrode; (3) preparing a first isolation film; (4) preparing a heating resistor; (5) preparing a second isolation film; (6) releasing the membrane; and (7) loading the gas sensitive material.