Abstract: A semiconductor device includes a substrate including active regions extending in a first direction; a device isolation layer surrounding the active regions on the substrate; gate structures intersecting the active regions and extending on the substrate in a second direction; source/drain regions on the active regions; contact plugs connected to the source/drain regions, respectively; a vertical buried structure penetrating through at least a portion of the device isolation layer, and in contact with the contact plugs; a vertical insulating layer covering at least a portion of side surfaces of the vertical buried structure; a horizontal buried structure below the vertical buried structure; a first conductive barrier covering at least a portion of an upper surface and side surfaces of the horizontal buried structure; and a metal-semiconductor compound pattern between the vertical buried structure and the first conductive barrier, wherein the vertical buried structure is between source/drain regions.

Abstract: A semiconductor device includes an interlayer dielectric layer on a substrate, a first connection line that fills a first trench of the interlayer dielectric layer, the first trench having a first width, and a second connection line that fills a second trench of the interlayer dielectric layer, the second trench having a second width greater than the first width, and the second connection line including a first metal layer that covers an inner sidewall of the second trench, a barrier layer that covers a bottom surface of the second trench, and a second metal layer on the first metal layer and the barrier layer, the first connection line and the first metal layer include a first metal, and the second metal layer includes a second metal different from the first metal.

Abstract: A combustor includes an inner liner forming a combustion chamber; an outer liner surrounding the inner liner to form a cooling passage in which compressed air flows; and a plurality of cooling guides installed around an inner circumferential surface of the outer liner to surround the combustion chamber, each of the cooling guides protruding from the inner circumferential surface to create an impinging jet from the compressed air flowing in the cooling passage. The plurality of cooling guides surrounding the combustion chamber are installed at regular intervals in a flow direction of the compressed air, and are arranged in staggered axial rows. Each cooling guide includes an air guiding surface facing the flow of the compressed air to guide the compressed air toward the inner liner. Accordingly, liner cooling efficiency can be enhanced by more effectively guiding the impinging jet toward the inner liner.

Abstract: A combustor includes an inner liner forming a combustion chamber; an outer liner surrounding the inner liner to form a cooling passage in which compressed air flows; and a plurality of cooling guides installed around an inner circumferential surface of the outer liner to surround the combustion chamber, each of the cooling guides protruding from the inner circumferential surface to create an impinging jet from the compressed air flowing in the cooling passage. The plurality of cooling guides surrounding the combustion chamber are installed at regular intervals in a flow direction of the compressed air, and are arranged in staggered axial rows. Each cooling guide includes an air guiding surface facing the flow of the compressed air to guide the compressed air toward the inner liner. Accordingly, liner cooling efficiency can be enhanced by more effectively guiding the impinging jet toward the inner liner.

Abstract: A combustor includes an inner liner forming a combustion chamber; an outer liner surrounding the inner liner to form a cooling passage in which compressed air flows; and a plurality of cooling guides installed around an inner circumferential surface of the outer liner to surround the combustion chamber, each of the cooling guides protruding from the inner circumferential surface to create an impinging jet from the compressed air flowing in the cooling passage. The plurality of cooling guides surrounding the combustion chamber are installed at regular intervals in a flow direction of the compressed air, and are arranged in staggered axial rows. Each cooling guide includes an air guiding surface facing the flow of the compressed air to guide the compressed air toward the inner liner. Accordingly, liner cooling efficiency can be enhanced by more effectively guiding the impinging jet toward the inner liner.

Abstract: A fuel nozzle includes a main cylinder extending in one direction; an auxiliary cylinder surrounding the main cylinder and defining a fuel passage between the auxiliary cylinder and the main cylinder; a shroud spaced that is apart from the auxiliary cylinder and surrounds the auxiliary cylinder; a swirler vane that is disposed between the auxiliary cylinder and the shroud and defines a fuel cavity communicating with the fuel passage so that fuel flowing in the fuel passage flows into the fuel cavity; and a fuel flow guide disposed inside the fuel cavity to guide fuel that flows from the fuel passage and enters the fuel cavity and to distribute the guided fuel in the fuel cavity. A fuel aperture is formed in the swirler vane to communicate with the fuel passage and the fuel cavity so that the fuel flows into the fuel cavity via the fuel aperture.

Abstract: A combustor includes a fuel injector to inject fuel; a cooling passage configured to pass compressed air for cooling an outer surface of a liner forming a combustion chamber for containing combustion gas; and a nozzle part that is coupled to the liner and has a rear surface facing the combustion chamber, the nozzle part configured to mix the compressed air with the fuel from the fuel injector and to discharge some of the compressed air in the cooling passage to the rear surface in order to block an introduction of the combustion gas into the nozzle part. Before the compressed air introduced through air introduction holes formed in a nozzle casing is discharged through through-holes formed in a nozzle cap, some of the compressed air may be introduced through bypass holes formed in a bypass tube and then discharged to the combustion chamber through the gap.

Abstract: A combustor has a structure enabling selective control of the amount of air supplied to the liner and the transition piece and includes a liner having one end connected to a fuel injector, the liner comprising an inner liner surrounded by an outer liner having a first opening that is elongated in a circumferential direction of the outer liner and is configured to introduce cooling air into an annular space between the inner liner and the outer liner; a liner sliding cover configured to adjust an opening degree of the first opening; and a transition piece connected at one end to the other end of the liner and connected to a turbine at the other end, the transition piece having an effusion hole configured to supply cooling air to a combustion chamber, the effusion hole having an opening area that is less than the opening degree of the first opening.

Abstract: A transition piece can include: an inner transition piece including an inlet and an outlet; an outer transition piece surrounding the inner transition piece with a flow passage; an outlet fin-pin flow guide disposed on the inner transition piece and located closer to the outlet than the inlet; a first bottom fin disposed at a bottom portion of the inner transition piece; and a second bottom fin disposed at the bottom portion of the inner transition piece, wherein the first bottom fin and the second bottom fin are arranged to be inclined to each other at an acute angle.

Abstract: A transition piece can include: an inner transition piece including an inlet and an outlet; an outer transition piece surrounding the inner transition piece with a flow passage; an outlet fin-pin flow guide disposed on the inner transition piece and located closer to the outlet than the inlet; a first bottom fin disposed at a bottom portion of the inner transition piece; and a second bottom fin disposed at the bottom portion of the inner transition piece, wherein the first bottom fin and the second bottom fin are arranged to be inclined to each other at an acute angle.

Abstract: A fuel nozzle includes a main cylinder extending in one direction; an auxiliary cylinder surrounding the main cylinder and defining a fuel passage between the auxiliary cylinder and the main cylinder; a shroud spaced that is apart from the auxiliary cylinder and surrounds the auxiliary cylinder; a swirler vane that is disposed between the auxiliary cylinder and the shroud and defines a fuel cavity communicating with the fuel passage so that fuel flowing in the fuel passage flows into the fuel cavity; and a fuel flow guide disposed inside the fuel cavity to guide fuel that flows from the fuel passage and enters the fuel cavity and to distribute the guided fuel in the fuel cavity. A fuel aperture is formed in the swirler vane to communicate with the fuel passage and the fuel cavity so that the fuel flows into the fuel cavity via the fuel aperture.

Abstract: An air flow guide cap for inducing an air flow into a through hole of the floor includes: an upper surface upwardly inclined relative to a horizontal plane; and a wall surface downwardly extending along edges of the upper surface except the edge adjacent to an air inlet.

Abstract: A combustor has a structure enabling selective control of the amount of air supplied to the liner and the transition piece and includes a liner having one end connected to a fuel injector, the liner comprising an inner liner surrounded by an outer liner having a first opening that is elongated in a circumferential direction of the outer liner and is configured to introduce cooling air into an annular space between the inner liner and the outer liner; a liner sliding cover configured to adjust an opening degree of the first opening; and a transition piece connected at one end to the other end of the liner and connected to a turbine at the other end, the transition piece having an effusion hole configured to supply cooling air to a combustion chamber, the effusion hole having an opening area that is less than the opening degree of the first opening.

Abstract: A combustor includes a fuel injector to inject fuel; a cooling passage configured to pass compressed air for cooling an outer surface of a liner forming a combustion chamber for containing combustion gas; and a nozzle part that is coupled to the liner and has a rear surface facing the combustion chamber, the nozzle part configured to mix the compressed air with the fuel from the fuel injector and to discharge some of the compressed air in the cooling passage to the rear surface in order to block an introduction of the combustion gas into the nozzle part. Before the compressed air introduced through air introduction holes formed in a nozzle casing is discharged through through-holes formed in a nozzle cap, some of the compressed air may be introduced through bypass holes formed in a bypass tube and then discharged to the combustion chamber through the gap.

Abstract: A combustor includes an inner liner forming a combustion chamber; an outer liner surrounding the inner liner to form a cooling passage in which compressed air flows; and a plurality of cooling guides installed around an inner circumferential surface of the outer liner to surround the combustion chamber, each of the cooling guides protruding from the inner circumferential surface to create an impinging jet from the compressed air flowing in the cooling passage. The plurality of cooling guides surrounding the combustion chamber are installed at regular intervals in a flow direction of the compressed air, and are arranged in staggered axial rows. Each cooling guide includes an air guiding surface facing the flow of the compressed air to guide the compressed air toward the inner liner. Accordingly, liner cooling efficiency can be enhanced by more effectively guiding the impinging jet toward the inner liner.

Abstract: An air flow guide cap for inducing an air flow into a through hole of the floor includes: an upper surface upwardly inclined relative to a horizontal plane; and a wall surface downwardly extending along edges of the upper surface except the edge adjacent to an air inlet.