Abstract: Provided is a plasma process simulation method including defining a plasma reaction for a wafer, calculating a reaction parameter of the plasma reaction, and generating a plasma process simulation profile based on a calculated reaction parameter. The reaction parameter are set based on a physical reaction and a chemical reaction.

Abstract: An air guide for a ceiling-type air conditioner is applied to the ceiling-type air conditioner comprising: an indoor unit having a heat exchanger and a blower embedded therein, and having a plurality of blowing passages for discharging, to the outside, air which has passed through the heat exchanger; a plurality of inlets for receiving the air discharged through the plurality of blowing passages; and a discharge panel having an inner space, of which at least a portion communicates with the plurality of inlets, and a ring or arc-shaped opening for discharging, into a room, air which has flowed into the inner space. The air guide includes: at least two partition parts formed in parallel to the radial direction of the opening, and dividing the inner space in the circumferential direction; and a curved part connecting the at least two partition parts, and formed in an arc shape, and is detachably inserted into the inside of the opening from the outside of the opening.

Abstract: A ceiling type air conditioner including an indoor unit having a built-in heat exchanger and a built-in blower, and having a plurality of blowing passages for discharging, to the outside, air having passed through the heat exchanger; a discharge panel having a plurality of inlets into which air discharged through the plurality of blowing passages is delivered, an inner space at least partially communicating with the partiality of inlets, and a ring-or arc-shaped opening for discharging, into a room, air flowing into the inner space; and an air guide module mounted to the discharge panel, and moved upward and downward or rotated so as to vary airflow discharged through the opening.

Abstract: A ceiling type air conditioner according to the present invention comprises: an indoor unit having a built-in heat exchanger and a built-in blower, and having a plurality of blowing passages for discharging, to the outside, air having passed through the heat exchanger; a discharge panel having a plurality of inlets into which air discharged through the plurality of blowing passages is delivered, an inner space at least partially communicating with the partiality of inlets, and a ring-or arc-shaped opening for discharging, into a room, air flowing into the inner space; and an air guide module mounted to the discharge panel, and moved upward and downward or rotated so as to vary airflow discharged through the opening.

Abstract: According to the present disclosure, an air guide for a ceiling-type air conditioner is applied to the ceiling-type air conditioner comprising: an indoor unit having a heat exchanger and a blower embedded therein, and having a plurality of blowing passages for discharging, to the outside, air which has passed through the heat exchanger; a plurality of inlets for receiving the air discharged through the plurality of blowing passages; and a discharge panel having an inner space, of which at least a portion communicates with the plurality of inlets, and a ring or arc-shaped opening for discharging, into a room, air which has flowed into the inner space. The air guide includes: at least two partition parts formed in parallel to the radial direction of the opening, and dividing the inner space in the circumferential direction; and a curved part connecting the at least two partition parts, and formed in an arc shape, and is detachably inserted into the inside of the opening from the outside of the opening.