Abstract: A substrate processing apparatus includes a table in an exposure chamber that is configured to perform an exposure process on a semiconductor substrate, a guiding device including a first horizontal driving body slidably movable in a first horizontal direction and a guide rail on the first horizontal driving body and having a trench extending in a second horizontal direction, a positioning device connected to the guiding device, the positioning device including a slider, a second horizontal driving body and a substrate stage, the slider configured to slidably move in the second horizontal direction along the trench, the second horizontal driving body connected or fixed to the slider, the substrate stage on the second horizontal driving body and configured to support the semiconductor substrate, and a blocking member between the guide rail and the substrate stage to block an inflow of foreign substances onto the substrate stage.

Abstract: A totally enclosed motor is provided that includes a housing which forms a motor space for the motor and a motor unit that has a rotor, a stator, and a rotor shaft. Additionally, a position sensor unit is configured to measure an angular position of the rotor. The motor space is air-tightly split to form a first space that encloses the motor unit and a second space that encloses the position sensor unit.

Abstract: The electric vehicle may comprise a high voltage battery, a power relay assembly (PRA) connected to the high voltage battery and an inverter capacitor. The PRA may comprise a first main relay connected to an anode of the high voltage battery, a second main relay connected to a cathode of the high voltage battery, and a precharge relay and a precharge resistor coupled in parallel to at least one of the first and the second main relay.

Abstract: A film capacitor is provided that includes a case in which a film cell is incorporated and a heat radiating plate including a heat absorption unit being positioned adjacent to the film cell while not being in contact with the film cell for absorbing heat and a heat radiating unit being exposed to the outside of the case. Preferred film capacitors can perform a stable operation and have durable lifespan, even when an inverter adopting the film capacitor is mounted on a trunk room and an engine room, by effectively cooling heat generated from a film cell of the film capacitor.

Abstract: A film capacitor comprises a case in which a film cell is incorporated and a heat radiating plate including a heat absorption unit being positioned adjacent to the film cell while not being in contact with the film cell for absorbing heat and a heat radiating unit being exposed to the outside of the case. The film capacitor can perform a stable operation and has durable lifespan, even when an inverter adopting the film capacitor is mounted on a trunk room and an engine room, by effectively cooling heat generated from a film cell of the film capacitor.