Abstract: Provided is an apparatus that transfers a substrate inside a substrate transfer chamber by a substrate transfer module using magnetic levitation. The apparatus includes: a substrate transfer chamber having a floor portion provided with a first magnet and connected, through an opening portion, to a substrate processing chamber in which the substrate is processed; and a substrate transfer module including a substrate holder configured to hold the substrate, and a second magnet configured such that a repulsive force acts between the first magnet and the second magnet. The substrate transfer module is movable inside the substrate transfer chamber by the magnetic levitation based on the repulsive force. The substrate transfer module performs loading/unloading of the substrate by directly entering into the substrate transfer chamber via the opening portion, or delivers the substrate to and from a substrate transfer mechanism fixedly provided inside the substrate transfer chamber.

Abstract: A substrate transfer device includes: a planar motor provided in a transfer chamber and including an array of coils, a transfer unit configured to move above the planar motor, and a controller configured to control supply of a current to the array of the coils, wherein the transfer unit includes a first base including an array of first magnets and configured to move above the planar motor, a second base including an array of second magnets and configured to move above the planar motor, the second base being arranged coaxially with the first base, and at least one arm configured to be extended or contracted by rotating the second base relative to the first base.

Abstract: A substrate processing system comprises a module having a mounting unit on which a substrate is mounted, a transfer chamber connected to the module, and a substrate transfer device disposed in the transfer chamber and configured to transfer the substrate to the module. The substrate transfer device includes a transfer unit having a substrate holder and a base that has therein a magnet and moves the substrate holder along a bottom portion of the transfer chamber, and a planar motor having a plurality of tiles arranged along the bottom portion of the transfer chamber, a plurality of electromagnetic coils disposed in the plurality of tiles, and a linear driving device configured to supply power to the electromagnetic coils and magnetically levitate and linearly drive the base. A tile corresponding to the module among the plurality of tiles is connected to the module without being connected to the transfer chamber.

Abstract: A method utilizing cold welding to prepare grain boundaries having different included angles includes using a device including a support member. Two bent members are arranged opposite to each other in the support member. One ends of the two bent members are both fixedly connected to the support member, one end, away from the support member, of any bent member is fixedly connected to a first sample, one end, away from the support member, of the other bent member is fixedly connected to a second sample, and the first sample and the second sample are arranged corresponding to each other. The bent member includes a first metal sheet and a second metal sheet having different thermal expansion coefficients. An angle between the first sample and the second sample during butt welding can be controlled by changing an included angle of a bimetallic sheet.

Abstract: An apparatus for transferring a substrate to a substrate processing chamber. The apparatus comprises: a substrate transfer chamber having a floor and a side wall; a substrate transfer module comprising a holder and second magnets, and configured to be movable in the substrate transfer chamber by magnetic levitation; and a controller configured to control an operating force for moving the substrate transfer module. The controller comprises: a parameter storage configured to store at least one model parameter; a control schedule creating section configured to acquire identification information and a movement schedule, to obtain the operating force, and to output a control schedule; and a magnetic force adjusting section configured to perform feedforward control.

Abstract: A capacitive element using a liquid as a dielectric, whereby the capacitance is prevented from changing. The capacitive element is equipped with: a storage container that has an inlet port for introducing a liquid serving as a dielectric, has an outlet port for discharging the liquid, and is filled with the liquid; and at least one pair of electrodes that are provided in the storage container and face each other, wherein an opening section for exhausting air bubbles in the storage container is formed in an upper wall of the storage container.

Abstract: A method utilizing cold welding to prepare grain boundaries having different included angles includes using a device including a support member. Two bent members are arranged opposite to each other in the support member. One ends of the two bent members are both fixedly connected to the support member, one end, away from the support member, of any bent member is fixedly connected to a first sample, one end, away from the support member, of the other bent member is fixedly connected to a second sample, and the first sample and the second sample are arranged corresponding to each other. The bent member includes a first metal sheet and a second metal sheet having different thermal expansion coefficients. An angle between the first sample and the second sample during butt welding can be controlled by changing an included angle of a bimetallic sheet.

Abstract: An opening/closing apparatus for opening/closing an opening which allows a first chamber and a second chamber adjacent to the first chamber to communicate with each other, includes a planar motor including coils arranged in the first chamber, a moving body including a valve body configured to move on the planar motor and close the opening, and a controller configured to control energization of the coils.

Abstract: A substrate transfer device includes: a planar motor provided in a transfer chamber and including an array of coils; a transfer unit configured to move above the planar motor; and a controller configured to control supply of a current to the array of the coils, wherein the transfer unit includes: a first base including an array of first magnets and configured to move above the planar motor; a second base including an array of second magnets and configured to move above the planar motor, the second base being arranged coaxially with the first base; and at least one arm configured to be extended/contracted by rotating the second base relative to the first base.

Abstract: The present disclosure provides an organic light emitting diode pixel structure and an organic light emitting diode display panel including the same. The organic light emitting diode pixel structure includes a driving circuit layer, a light emitting function layer, and a color resist layer. The driving circuit layer includes pixel driving circuits. The color resist layer includes color resists arranged in an array. The pixel driving circuits are disposed in interval regions outside long sides of the color resists. Because size of the pixel driving circuits is much larger than a width of traces, each width between adjacent pixels is increased. This avoids light leakage caused by pixel intervals being too small.

Abstract: A transfer apparatus transfers a first substrate and a second substrate while holding the first substrate and the second substrate to overlap each other in a plan view. The transfer apparatus includes: a first holding arm configured to hold the first substrate in a horizontal direction; a second holding arm configured to hold the second substrate in the horizontal direction; a first detection sensor configured to detect presence/absence of the first substrate held by the first holding arm; and a second detection sensor configured to detect presence/absence of the second substrate held by the second holding arm, wherein the first detection sensor includes a sensor configured to detect the presence/absence of the first substrate, and wherein the first holding arm includes a notch formed at least at an inner end portion of a tip of the first holding arm and configured to allow the optical axis to pass therethrough.

Abstract: The present disclosure provides an organic light emitting diode pixel structure and an organic light emitting diode display panel including the same. The organic light emitting diode pixel structure includes a driving circuit layer, a light emitting function layer, and a color resist layer. The driving circuit layer includes pixel driving circuits. The color resist layer includes color resists arranged in an array. The pixel driving circuits are disposed in interval regions outside long sides of the color resists. Because size of the pixel driving circuits is much larger than a width of traces, each width between adjacent pixels is increased. This avoids light leakage caused by pixel intervals being too small.

Abstract: The disclosure discloses a frame component, which includes a frame with a positioning slot in an inner edge thereof, a fabrication strip with grooves, and a plurality of support pieces; where the fabrication strip is detachably arranged in the positioning slot, and the plurality of support pieces are fixed in the grooves to form a support plane for supporting a mask.

Abstract: The embodiments of the present disclosure propose a device for inspecting a mask plate, a method for inspecting a mask plate, and a corresponding method for controlling light sources. The device includes: an image sensor configured to capture an image of the mask plate; and a plurality of light sources disposed on one side of the mask plate opposite to the image sensor, wherein at least one of the plurality of light sources is configure to emit light when the image sensor is capturing an image of a first region of the mask plate, and the at least one light source comprises light sources within a first range, wherein the first range corresponds to the first region and an orthographic projection of the image sensor on a light source plane falls within the first range.

Abstract: The impedance of an antenna is reduced and gaps generated between electrodes constituting a capacitance element and a dielectric body are eliminated. An antenna (3) for generating inductively coupled plasma P includes at least two conductor elements (31), an insulation element (32) that is arranged between the mutually adjacent conductor elements (31) and insulates the conductor elements (31), and a capacitance element (33) that is connected electrically to and in series with the mutually adjacent conductor elements (31). The capacitance element (33) is configured from a first electrode (33A) electrically connected to one of the mutually adjacent conductor elements (21), a second electrode (33B) electrically connected to the other of the mutually adjacent conductor elements (21), and a liquid dielectric body filling the space between the first electrode (33A) and the second electrode (33B).

Abstract: A capacitive element using a liquid as a dielectric, whereby the capacitance is prevented from changing. The capacitive element is equipped with: a storage container that has an inlet port for introducing a liquid serving as a dielectric, has an outlet port for discharging the liquid, and is filled with the liquid; and at least one pair of electrodes that are provided in the storage container and face each other, wherein an opening section for exhausting air bubbles in the storage container is formed in an upper wall of the storage container.

Abstract: Disclosed herein is a culture system for chemical induction of pluripotent stem cells, comprising a basic culture medium and a composition for performing chemical induction of reprogramming process. The said composition comprises a thymine analogue, a cAMP activator, a TGF-? receptor inhibitor, a bone morphogenetic protein, a RA receptor activator, a GSK3 inhibitor and a basic fibroblast growth factor. And the said culture system is free of serum. By using the culture system as described herein, there is no need to frequently replate cells during culture, such that culturing process is simplified and loss of cells resulting from replating cells is reduced. As the culture system is free of serum, subsequent collection of pluripotent stem cells and molecular mechanism analysis are simplified, thereby facilitating establishment of no animal origin culture systems for induction of pluripotent stem cells.

Abstract: Methods, systems, and apparatus, including computer programs encoded on computer storage media, for data processing are provided. One of the methods includes: obtaining a bytecode compiled from source code comprising one or more input parameters, the source code including an encoding function to encode the one or more input parameters, save the encoded one or more input parameters in a memory segment, and provide a memory location of the memory segment; executing, according to the bytecode, the encoding function to encode the one or more input parameters to obtain the memory location of the memory segment storing the encoded one or more input parameters; and providing the memory location to a function for retrieving and decoding the encoded one or more input parameters to obtain the one or more input parameters.

Abstract: Methods, systems, and apparatus, including computer programs encoded on computer storage media, for data processing are provided. One of the methods includes: obtaining a bytecode compiled from source code comprising one or more input parameters, the source code including an encoding function to encode the one or more input parameters, save the encoded one or more input parameters in a memory segment, and provide a memory location of the memory segment; executing, according to the bytecode, the encoding function to encode the one or more input parameters to obtain the memory location of the memory segment storing the encoded one or more input parameters; and providing the memory location to a function for retrieving and decoding the encoded one or more input parameters to obtain the one or more input parameters.

Abstract: Methods, systems, and apparatus, including computer programs encoded on computer storage media, for data processing are provided. One of the methods includes: obtaining a bytecode compiled from source code comprising one or more input parameters, the source code including an encoding function to encode the one or more input parameters, save the encoded one or more input parameters in a memory segment, and provide a memory location of the memory segment; executing, according to the bytecode, the encoding function to encode the one or more input parameters to obtain the memory location of the memory segment storing the encoded one or more input parameters; and providing the memory location to a function for retrieving and decoding the encoded one or more input parameters to obtain the one or more input parameters.