Patents by Inventor Dongxi Sun

Dongxi Sun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Valve control system for atomic layer deposition chamber
    Patent number: 7201803
    Abstract: A valve control system for a semiconductor processing chamber includes a system control computer and a plurality of electrically controlled valves associated with the processing chamber. The system further includes a programmable logic controller in communication with the system control computer and operatively coupled to the electrically controlled valves. The refresh time for control of the valves may be less than 10 milliseconds. Consequently, valve control operations do not significantly extend the period of time required for highly repetitive cycling in atomic layer deposition processes. A hardware interlock may be implemented through the output power supply of the programmable logic controller.
    Type: Grant
    Filed: December 9, 2003
    Date of Patent: April 10, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Siqing Lu, Yu Chang, Dongxi Sun, Vinh Dang, Michael X. Yang, Anzhong (Andrew) Chang, Anh N. Nguyen, Ming Xi
  • Valve control system for atomic layer deposition chamber
    Publication number: 20040143370
    Abstract: A valve control system for a semiconductor processing chamber includes a system control computer and a plurality of electrically controlled valves associated with the processing chamber. The system further includes a programmable logic controller in communication with the system control computer and operatively coupled to the electrically controlled valves. The refresh time for control of the valves may be less than 10 milliseconds. Consequently, valve control operations do not significantly extend the period of time required for highly repetitive cycling in atomic layer deposition processes. A hardware interlock may be implemented through the output power supply of the programmable logic controller.
    Type: Application
    Filed: December 9, 2003
    Publication date: July 22, 2004
    Inventors: Siqing Lu, Yu Chang, Dongxi Sun, Vinh Dang, Michael X. Yang, Anzhong Chang, Anh N. Nguyen, Ming Xi
  • Valve control system for atomic layer deposition chamber
    Patent number: 6734020
    Abstract: A valve control system for a semiconductor processing chamber includes a system control computer and a plurality of electrically controlled valves associated with the processing chamber. The system further includes a programmable logic controller in communication with the system control computer and operatively coupled to the electrically controlled valves. The refresh time for control of the valves may be less than 10 milliseconds. Consequently, valve control operations do not significantly extend the period of time required for highly repetitive cycling in atomic layer deposition processes. A hardware interlock may be implemented through the output power supply of the programmable logic controller.
    Type: Grant
    Filed: March 7, 2001
    Date of Patent: May 11, 2004
    Assignee: Applied Materials, Inc.
    Inventors: Siqing Lu, Yu Chang, Dongxi Sun, Vinh Dang, Michael X. Yang, Anzhong Chang, Anh N. Nguyen, Ming Xi
  • Valve control system for atomic layer deposition chamber
    Publication number: 20020127745
    Abstract: A valve control system for a semiconductor processing chamber includes a system control computer and a plurality of electrically controlled valves associated with the processing chamber. The system further includes a programmable logic controller in communication with the system control computer and operatively coupled to the electrically controlled valves. The refresh time for control of the valves may be less than 10 milliseconds. Consequently, valve control operations do not significantly extend the period of time required for highly repetitive cycling in atomic layer deposition processes. A hardware interlock may be implemented through the output power supply of the programmable logic controller.
    Type: Application
    Filed: March 7, 2001
    Publication date: September 12, 2002
    Inventors: Siqing Lu, Yu Chang, Dongxi Sun, Vinh Dang, Michael X. Yang, Anzhong Andrew Chang, Anh N. Nguyen, Ming Xi