Abstract: A power supply comprises at least one waveform generator that produces a clamp waveform responsive to a clamp signal, and at least one amplifier that amplifies and provides the clamp waveform to an electrostatic chuck. An advisor module receives parameter values for parameters affecting operation of the power supply, uses a neural network to determine whether the parameter values are consistent with trained parameter values, and continuously and automatically modifies weighting of inputs to the neural network when any parameter values are inconsistent with the trained parameter values. A controller provides the clamp signal to the waveform generator, receives reports from the advisor module, and adjusts the clamp signal or provides a status report when any parameter values are inconsistent with the trained parameter values.

Abstract: An apparatus, system, and method for managing an electrostatic charge of a workpiece are disclosed. The method comprises coupling an electrostatic voltmeter to a conductor, coupling a charge-adjustment system to the conductor, and coupling the conductor to the workpiece. A level of charge in the workpiece is adjusted, via the conductor, with the charge-adjustment circuit and a voltage of the workpiece is monitored, via the conductor, with the electrostatic voltmeter. A controller may be used to adjust the charge on the workpiece based upon the monitored voltage.

Abstract: A power supply comprises at least one waveform generator that produces a clamp waveform responsive to a clamp signal, and at least one amplifier that amplifies and provides the clamp waveform to an electrostatic chuck. An advisor module receives parameter values for parameters affecting operation of the power supply, uses a neural network to determine whether the parameter values are consistent with trained parameter values, and continuously and automatically modifies weighting of inputs to the neural network when any parameter values are inconsistent with the trained parameter values. A controller provides the clamp signal to the waveform generator, receives reports from the advisor module, and adjusts the clamp signal or provides a status report when any parameter values are inconsistent with the trained parameter values.

Abstract: A clamping system and a method of clamping a work piece are disclosed. The clamping system has an electrostatic clamp and a high-impedance voltmeter (“HIV”). The electro-static clamp may include a platen and a plurality of electrodes embedded in the platen. In use, at least some of the embedded electrodes provide one side of a capacitor and a work piece provides another side of the capacitor in order to hold the work piece relative to the platen when at least some of the embedded electrodes are electrically charged. The HIV is electrically connected to at least some of the embedded electrodes.

Abstract: Systems and methods for monitoring an environmental parameter. A system includes a sensing cable configured to produce a triboelectric signal along at least one conductor of the cable and an electrostatic voltmeter coupled to the sensing cable and configured to provide an output signal responsive to the triboelectric signal. A conversion module is configured to convert the output signal to one or more parameter values indicative of the environmental parameter, and an interface provides a usable representation of the parameter value. The environmental parameter monitored may exemplarily be temperature monitored by the sensing cable as a thermally expandable/contractible semi-rigid coaxial cable, or the monitored environmental parameter may exemplary be vibration, movement, or force monitored by the sensing cable as a deformable coaxial cable.

Abstract: An apparatus, system, and method for managing an electrostatic charge of a workpiece are disclosed. The method comprises coupling an electrostatic voltmeter to a conductor, coupling a charge-adjustment system to the conductor, and coupling the conductor to the workpiece. A level of charge in the workpiece is adjusted, via the conductor, with the charge-adjustment circuit and a voltage of the workpiece is monitored, via the conductor, with the electrostatic voltmeter. A controller may be used to adjust the charge on the workpiece based upon the monitored voltage.

Abstract: Pulse power supply systems and methods are disclosed. A method includes providing earth-ground-referenced control circuitry and providing floating pulsed-power circuitry. The method also includes providing a DC offset voltage to the return port of the pulsed-power circuitry with a DC offset module and providing a peak voltage to the pulsed-power circuitry with a DC voltage source. Power is applied from a power source of the control circuitry to a driver of the pulsed-power circuitry via a galvanically-isolating power path and a trigger signal is applied from the control circuitry to the driver via a galvanically-isolated signal path to prompt the driver to produce a driver signal. A voltage pulse is produced between the output port and the return port by closing the switch with the driver signal to couple the peak voltage to the output port.

Abstract: An apparatus and method for managing an electrostatic charge of a workpiece are disclosed. The method includes coupling an electrostatic voltmeter to a conductor, coupling a charge-adjustment system to the conductor, and coupling the conductor to the workpiece. A level of charge in the workpiece is adjusted, via the conductor, with the charge-adjustment circuit and a voltage of the workpiece is monitored, via the conductor, with the electrostatic voltmeter. A controller may be used to adjust the charge on the workpiece based upon the monitored voltage.

Abstract: Pulse power supply systems and methods are disclosed. A method includes providing earth-ground-referenced control circuitry and providing floating pulsed-power circuitry. The method also includes providing a DC offset voltage to the return port of the pulsed-power circuitry with a DC offset module and providing a peak voltage to the pulsed-power circuitry with a DC voltage source. Power is applied from a power source of the control circuitry to a driver of the pulsed-power circuitry via a galvanically-isolating power path and a trigger signal is applied from the control circuitry to the driver via a galvanically-isolated signal path to prompt the driver to produce a driver signal. A voltage pulse is produced between the output port and the return port by closing the switch with the driver signal to couple the peak voltage to the output port.

Abstract: Systems and methods for monitoring an environmental parameter are disclosed. A system includes a cable configured to produce a triboelectric signal along at least one conductor of the cable and an electrostatic voltmeter coupled to the cable and configured to provide an output signal responsive to the triboelectric signal. A conversion module is configured to convert the output signal to one or more parameter values indicative of the environmental parameter, and an interface provides a usable representation of the parameter value.

Abstract: Pulse power supply systems and methods are disclosed. A method includes providing earth-ground-referenced control circuitry and providing floating pulsed-power circuitry. The method also includes providing a DC offset voltage to the return port of the pulsed-power circuitry with a DC offset module and providing a peak voltage to the pulsed-power circuitry with a DC voltage source. Power is applied from a power source of the control circuitry to a driver of the pulsed-power circuitry via a galvanically-isolating power path and a trigger signal is applied from the control circuitry to the driver via a galvanically-isolated signal path to prompt the driver to produce a driver signal. A voltage pulse is produced between the output port and the return port by closing the switch with the driver signal to couple the peak voltage to the output port.

Abstract: An apparatus and method for managing an electrostatic charge of a workpiece are disclosed. The method includes coupling an electrostatic voltmeter to a conductor, coupling a charge-adjustment system to the conductor, and coupling the conductor to the workpiece. A level of charge in the workpiece is adjusted, via the conductor, with the charge-adjustment circuit and a voltage of the workpiece is monitored, via the conductor, with the electrostatic voltmeter. A controller may be used to adjust the charge on the workpiece based upon the monitored voltage.

Abstract: A clamping system and a method of clamping a work piece are disclosed. The clamping system has an electrostatic clamp and a high-impedance voltmeter (“HIV”). The electro-static clamp may include a platen and a plurality of electrodes embedded in the platen. In use, at least some of the embedded electrodes provide one side of a capacitor and a work piece provides another side of the capacitor in order to hold the work piece relative to the platen when at least some of the embedded electrodes are electrically charged. The HIV is electrically connected to at least some of the embedded electrodes.