Abstract: Embodiments of the inventive concept provide a wireless power apparatus for a substrate treating apparatus and a manufacturing method for the wireless power apparatus for the substrate treating apparatus for preventing a heat generation by preventing a generation of an eddy current in a coupling element, if the coupling element is used around an outer housing at which an induced magnetic field is formed. The inventive concept provides a wireless power apparatus for a substrate treating apparatus.

Abstract: Provided is a transport system to facilitate interlayer movement of a transported object. The transport system comprises: a rail device; and a transport vehicle moving in the rail device, wherein the rail device comprises: a first rail with a first inclination angle; a second rail with a second inclination angle larger than the first inclination angle; a first connection rail configured to connect the first rail to the second rail; and a rack rail installed along the first connection rail and the second rail, wherein the transport vehicle comprises: a frame; a driving wheel connected to the frame and moving the first rail, the first connection rail and the second rail; and a pinion gear connected to the frame and moving along the rack rail.