Patents by Inventor Doo-Hoo Goo

Doo-Hoo Goo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Flare evaluation methods
    Patent number: 8158958
    Abstract: A flare evaluation method includes: extracting DC flare reference data using a preliminary measurement pattern mask and a dummy mask having an open region in which a preliminary measurement pattern is formed; providing a plurality of flare gauge sets including an opaque pad, a measurement pattern, and a flare pattern, the measure pattern being disposed at an inside of the opaque pad to measure strength of a flare, the flare pattern being disposed at an outside of the opaque pad to generate the flare; and detecting a change of a photo resist measurement pattern caused by the flare pattern and the measurement pattern for each of the flare gauge sets, wherein an outer radius of the flare pattern increases by a predetermined amount depending on the flare gauge set.
    Type: Grant
    Filed: March 26, 2010
    Date of Patent: April 17, 2012
    Assignee: Samsung Electronics Co. Ltd.
    Inventors: In-Sung Kim, Jooon Park, Doo-Hoo Goo, Jeong-Hoon Lee, Chang-Min Park
  • Flare Evaluation Methods
    Publication number: 20100258744
    Abstract: A flare evaluation method includes: extracting DC flare reference data using a preliminary measurement pattern mask and a dummy mask having an open region in which a preliminary measurement pattern is formed; providing a plurality of flare gauge sets including an opaque pad, a measurement pattern, and a flare pattern, the measure pattern being disposed at an inside of the opaque pad to measure strength of a flare, the flare pattern being disposed at an outside of the opaque pad to generate the flare; and detecting a change of a photo resist measurement pattern caused by the flare pattern and the measurement pattern for each of the flare gauge sets, wherein an outer radius of the flare pattern increases by a predetermined amount depending on the flare gauge set.
    Type: Application
    Filed: March 26, 2010
    Publication date: October 14, 2010
    Inventors: In-Sung Kim, Jooon Park, Doo-Hoo Goo, Jeong-Hoon Lee, Chang-Min Park