Patents by Inventor Dooseon Yu

Dooseon Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DEPOSITION APPARATUS AND DISPLAY PANEL MANUFACTURING APPARATUS INCLUDING THE SAME
    Publication number: 20220181196
    Abstract: A deposition apparatus includes: a susceptor provided with a plurality of susceptor holes defined therein; an electrostatic chuck disposed on the susceptor and provided with a plurality of electrostatic chuck holes defined therein; and a plurality of pins penetrating through the susceptor and the electrostatic chuck to connect the susceptor and the electrostatic chuck. Each of the pins includes a first portion disposed in a corresponding electrostatic chuck hole of the plurality of electrostatic chuck holes and a second portion disposed in a corresponding susceptor hole of the plurality of susceptor holes. The first portion includes a first base portion and a first cooler disposed in the first base portion.
    Type: Application
    Filed: August 16, 2021
    Publication date: June 9, 2022
    Inventors: Gyungmin Baek, Hyunah Sung, Hyuneok Shin, Namwook Kang, Dooseon Yu, You Jong Lee