Patents by Inventor Doris Chin

Doris Chin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Selecting a hypothetical profile to use in optical metrology
    Patent number: 7394554
    Abstract: A hypothetical profile is used to model the profile of a structure formed on a semiconductor wafer to use in determining the profile of the structure using optical metrology. To select a hypothetical profile, sample diffraction signals are obtained from measured diffraction signals of structures formed on the wafer, where the sample diffraction signals are a representative sampling of the measured diffraction signals. A hypothetical profile is defined and evaluated using a sample diffraction signal from the obtained sample diffraction signals.
    Type: Grant
    Filed: September 15, 2003
    Date of Patent: July 1, 2008
    Assignee: Timbre Technologies, Inc.
    Inventors: Vi Vuong, Junwei Bao, Srinivas Doddi, Emmanuel Drege, Jin Wen, Sanjay Yedur, Doris Chin, Nickhil Jakatdar, Lawrence Lane
  • Selecting a hypothetical profile to use in optical metrology
    Publication number: 20050057748
    Abstract: A hypothetical profile is used to model the profile of a structure formed on a semiconductor wafer to use in determining the profile of the structure using optical metrology. To select a hypothetical profile, sample diffraction signals are obtained from measured diffraction signals of structures formed on the wafer, where the sample diffraction signals are a representative sampling of the measured diffraction signals. A hypothetical profile is defined and evaluated using a sample diffraction signal from the obtained sample diffraction signals.
    Type: Application
    Filed: September 15, 2003
    Publication date: March 17, 2005
    Applicant: TimbreTechnologies, Inc.
    Inventors: Vi Vuong, Junwei Bao, Srini Doddi, Emmanuel Drege, Jin Wen, Sanjay Yedur, Doris Chin, Nickhil Jakatdar, Lawrence Lane