Abstract: A hypothetical profile is used to model the profile of a structure formed on a semiconductor wafer to use in determining the profile of the structure using optical metrology. To select a hypothetical profile, sample diffraction signals are obtained from measured diffraction signals of structures formed on the wafer, where the sample diffraction signals are a representative sampling of the measured diffraction signals. A hypothetical profile is defined and evaluated using a sample diffraction signal from the obtained sample diffraction signals.

Abstract: A hypothetical profile is used to model the profile of a structure formed on a semiconductor wafer to use in determining the profile of the structure using optical metrology. To select a hypothetical profile, sample diffraction signals are obtained from measured diffraction signals of structures formed on the wafer, where the sample diffraction signals are a representative sampling of the measured diffraction signals. A hypothetical profile is defined and evaluated using a sample diffraction signal from the obtained sample diffraction signals.

Abstract: An apparatus and method in a tablet computer for disambiguating a handwriting input stream generated by a stylus-based user interface. A tablet application program interface (TAPI) of the present invention receives stroke data generated by a stroke made by a user on a digitizing tablet. The TAPI inserts the stroke data into a database. If the stroke is an editing gesture, the TAPI routes the stroke to a gesture recognizer which identifies an editing dialog. The TAPI then executes the dialog to perform operations on the database. If the application program is expecting text input, the TAPI continues to receive stroke data until it detects a closure event. The TAPI then forms a stroke group entry in the database by grouping all non-gesture stroke data received since the last closure event. The TAPI routes the stroke group data to a character recognizer, which returns candidate characters. The TAPI inserts the candidate characters into the stroke group entry.