Patents by Inventor Doris Ottenlinger

Doris Ottenlinger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device and method for the treatment of wafers
    Publication number: 20070228004
    Abstract: A device and a method is provided for irradiating wafers with low-intensity UV light to prevent blistering during the subsequent photostabilization of the photoresist.
    Type: Application
    Filed: April 4, 2007
    Publication date: October 4, 2007
    Inventors: Juergen-Werner Molkenthin, Doris Ottenlinger