Patents by Inventor Doris Pik-Yu CHUN

Doris Pik-Yu CHUN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200176683
    Abstract: A method of analyzing film on a substrate comprises receiving surface profile data obtained from measurements of a plurality of discrete regions on a substrate, the plurality of discrete regions comprising one or more film layers; extracting a plurality of parameters from the received surface profile data, the plurality of parameters comprising one or more parameters of the one or more film layers of each of the plurality of discrete regions, wherein the extracting is based on a predetermined pattern for the plurality of the discrete regions on the substrate; and displaying a user interface.
    Type: Application
    Filed: February 10, 2020
    Publication date: June 4, 2020
    Applicant: Kateeva, Inc.
    Inventors: Doris Pik-Yu CHUN, Ian David PARKER