Abstract: A multi-beam electronics scanning system using swathing. The system includes an electron emitter source configured to emit an illumination beam. The illumination beam is split into multiple electron beams by a beam splitter lens array. The system also includes an electronic deflection system configured to deflect each of the electron beams in a plurality of directions, including a first direction, along two different axes. Last, a swathing stage is used to move a sample with a constant velocity in a second direction that is parallel to the first direction.

Abstract: A multi-beam electronics scanning system using swathing. The system includes an electron emitter source configured to emit an illumination beam. The illumination beam is split into multiple electron beams by a beam splitter lens array. The system also includes an electronic deflection system configured to deflect each of the electron beams in a plurality of directions, including a first direction, along two different axes. Last, a swathing stage is used to move a sample with a constant velocity in a second direction that is parallel to the first direction.

Abstract: A filter system for receiving an aqueous-based fluid contaminated with particles and emulsified contaminant oil, removing the particles, and separating the emulsified contaminant oil from the aqueous-based fluid includes a filter media for receiving the aqueous-based fluid and emulsified contaminant oil, having an inner filter element formed from a 95 percent single pass efficiency 48 micron (5 micron nominal) filtering material of needle punch polypropylene felt, an outer filter element formed from a 95 percent single pass efficiency 19 micron absolute filtering material of a polypropylene microfiber material and a porous spunbond polypropylene sandwiching the outer filter media.

Abstract: A filter system for receiving an aqueous-based fluid contaminated with particles and emulsified contaminant oil, removing the particles, and separating the emulsified contaminant oil from the aqueous-based fluid includes a filter media for receiving the aqueous-based fluid and emulsified contaminant oil, having an inner filter element formed from a 95 percent single pass efficiency 48 micron (5 micron nominal) filtering material of needle punch polypropylene felt, an outer filter element formed from a 95 percent single pass efficiency 19 micron absolute filtering material of a polypropylene microfiber material and a porous spunbond polypropylene sandwiching the outer filter media.

Abstract: A time shift circuit for changing a delay timing of a portion of a test pattern for testing a semiconductor device. The time shift circuit includes a multiplexer for selectively producing delay value data indicating a value of time shift in response to a shift command signal, a vernier delay unit for producing timing vernier data based on the delay value data selected by the multiplexer, and a timing generator for generating a timing edge for the specific portion of the test pattern based on the timing vernier data from the vernier delay unit. The shift command signal sets either a normal mode where predetermined delay value data is selected by the multiplexer or a time shift mode where delay value data for shifting the timing edge in real time is selected by the multiplexer.

Abstract: A time shift circuit for changing a delay timing of a portion of a test pattern for testing a semiconductor device. The time shift circuit includes a multiplexer for selectively producing delay value data indicating a value of time shift in response to a shift command signal, a vernier delay unit for producing timing vernier data based on the delay value data selected by the multiplexer, and a timing generator for generating a timing edge for the specific portion of the test pattern based on the timing vernier data. The shift command signal sets either a normal mode where predetermined delay value data is selected by the multiplexer or a time shift mode where delay value data for shifting the timing edge in real time is selected by the multiplexer.