Patents by Inventor Doug Matheson

Doug Matheson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical etch solution and technique for imaging a device's shallow junction profile
    Publication number: 20080011717
    Abstract: The present invention provides, in one aspect, a method of imaging a microelectronics device 100. The method comprises cleaning, when contaminants are preset, a sample of a microelectronics device 100 to be imaged with a first solution comprising hydrofluoric acid, an inorganic acid and water, exposing the sample to a second solution comprising hydrofluoric acid, an inorganic acid and an organic acid, wherein the second solution forms a contrast between different regions within the sample, and producing an image of the contrasted sample.
    Type: Application
    Filed: July 23, 2007
    Publication date: January 17, 2008
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Lancy Tsung, Adolfo Anciso, Doug Matheson
  • Chemical etch solution and technique for imaging a device's shallow junction profile
    Patent number: 7262409
    Abstract: The present invention provides, in one aspect, a method of imaging a microelectronics device 100. The method comprises cleaning, when contaminants are preset, a sample of a microelectronics device 100 to be imaged with a first solution comprising hydrofluoric acid, an inorganic acid and water, exposing the sample to a second solution comprising hydrofluoric acid, an inorganic acid and an organic acid, wherein the second solution forms a contrast between different regions within the sample, and producing an image of the contrasted sample.
    Type: Grant
    Filed: January 4, 2005
    Date of Patent: August 28, 2007
    Assignee: Texas Instruments Incorporated
    Inventors: Lancy Y. Tsung, Adolfo Anciso, Doug Matheson
  • Chemical etch solution and technique for imaging a device's shallow junction profile
    Publication number: 20060145073
    Abstract: The present invention provides, in one aspect, a method of imaging a microelectronics device 100. The method comprises cleaning, when contaminants are preset, a sample of a microelectronics device 100 to be imaged with a first solution comprising hydrofluoric acid, an inorganic acid and water, exposing the sample to a second solution comprising hydrofluoric acid, an inorganic acid and an organic acid, wherein the second solution forms a contrast between different regions within the sample, and producing an image of the contrasted sample.
    Type: Application
    Filed: January 4, 2005
    Publication date: July 6, 2006
    Applicant: Texas Instruments, Inc.
    Inventors: Lancy Tsung, Adolfo Anciso, Doug Matheson