Abstract: A thermal protection system for a chemical vapor deposition machine (CVD). The system of the present invention includes a thermal sensor for providing a temperature signal corresponding to a CVD chamber temperature, a heating component for heating the CVD chamber, and a controller for regulating the CVD chamber temperature. The controller is coupled to receive the temperature signal and to control the heating component in response thereto. An interlock circuit is coupled between the heating component and the controller. The interlock circuit has an open state and a closed state. A comparison circuit is coupled to receive the temperature signal and coupled to control the interlock circuit, wherein the comparison circuit effects a comparison between the temperature signal and a reference and commands the interlock to the open state when the temperature signal exceeds the reference.

Abstract: A test fixture and method emulate the inputs and/or outputs to a controller and motor of a spin rinse dryer to permit selective testing of the controller and/or motor thereof. In some instances, the test fixture enables testing of a spin rinse dryer controller and/or motor to be performed outside of a clean room environment, and without requiring a spin rinse dryer to be taken off-line. In other instances, the same test fixture enables diagnosis of which component if any has failed in a production spin rinse dryer so that the failed component can be replaced quickly to minimize the downtime of the equipment.