Abstract: Methods, apparatus, and assemblies are provided for a substrate carrier adapter insert including an adapter frame including a support rail adapted to support one or more substrates in a substrate carrier, a frame extension coupled to, or integral with, the adapter frame, and a mapping feature formed on the frame extension and disposed to be detected by a sensor for determining whether an adapter insert is present or absent in a substrate carrier. Numerous additional features are disclosed.

Abstract: A method of purging a substrate carrier at a load port includes: opening a door of a substrate carrier that is delivered to a load port; spraying the substrate carrier with a gas flow responsive to the opening the door; mapping substrates within the substrate carrier to generate a substrate map; determining a process purge state based on the substrate map; and activating one or more inter-substrate nozzle arrays and one or more curtain nozzle arrays using a predefined spray status configuration for the process purge state.

Abstract: A method of purging a substrate carrier at a load port includes: opening a door of a substrate carrier that is delivered to a load port; spraying the substrate carrier with a gas flow responsive to the opening the door; mapping substrates within the substrate carrier to generate a substrate map; determining a process purge state based on the substrate map; and activating one or more inter-substrate nozzle arrays and one or more curtain nozzle arrays using a predefined spray status configuration for the process purge state.

Abstract: Embodiments of the present invention provide systems, apparatus, and methods for purging a substrate carrier. Embodiments include a frame configured to sit proximate to a load port door without interfering with operation of a factory interface or equipment front end module robot; one or more inter-substrate nozzle arrays supported by the frame and configured to spray gas into a substrate carrier; and one or more curtain nozzle arrays supported by the frame and configured to spray gas across an opening of the substrate carrier. Numerous additional aspects are disclosed.

Abstract: Methods, apparatus, and assemblies are provided for a substrate carrier adapter insert including an adapter frame including a support rail adapted to support one or more substrates in a substrate carrier, a frame extension coupled to, or integral with, the adapter frame, and a mapping feature formed on the frame extension and disposed to be detected by a sensor for determining whether an adapter insert is present or absent in a substrate carrier. Numerous additional features are disclosed.

Abstract: Methods, apparatus, and assemblies are provided for an adapter insert including an adapter frame including a support rail adapted to support one or more substrates in a substrate carrier, a frame extension coupled to, or integral with, the adapter frame, and a mapping feature formed on the frame extension and disposed to be detected by a sensor for determining whether an adapter insert is present or absent in a substrate carrier. Numerous additional features are disclosed.

Abstract: Embodiments of the present invention provide systems, apparatus, and methods for purging a substrate carrier. Embodiments include a frame configured to sit proximate to a load port door without interfering with operation of a factory interface or equipment front end module robot; one or more inter-substrate nozzle arrays supported by the frame and configured to spray gas into a substrate carrier; and one or more curtain nozzle arrays supported by the frame and configured to spray gas across an opening of the substrate carrier. Numerous additional aspects are disclosed.

Abstract: Methods, apparatus, and assemblies are provided for an adapter insert including an adapter frame including a support rail adapted to support one or more substrates in a substrate carrier, a frame extension coupled to, or integral with, the adapter frame, and a mapping feature formed on the frame extension and disposed to be detected by a sensor for determining whether an adapter insert is present or absent in a substrate carrier. Numerous additional features are disclosed.

Abstract: In a first aspect, a method of manufacturing a substrate is provided wherein an end effector mounted substrate is attempted to be placed, that is put, onto a substrate support, such as a pedestal or slotted support of a substrate carrier, and the effectiveness of the put is verified by a sensor associated with the end effector. In one embodiment, the verification takes place during the retraction motion of the end effector and is accomplished by sensing the presence, absence, or location of the substrate on the substrate support. The sensor may be a through beam sensor, and may be mounted on, coupled to or otherwise move with the end effector adapted to carry the substrate. Numerous other aspects are described.

Abstract: In a first aspect, a method of manufacturing a substrate is provided wherein an end effector mounted substrate is attempted to be placed, that is put, onto a substrate support, such as a pedestal or slotted support of a substrate carrier, and the effectiveness of the put is verified by a sensor associated with the end effector. In one embodiment, the verification takes place during the retraction motion of the end effector and is accomplished by sensing the presence, absence, or location of the substrate on the substrate support. The sensor may be a through beam sensor, and may be mounted on, coupled to or otherwise move with the end effector adapted to carry the substrate. Numerous other aspects are described.

Abstract: Thrust transmittal means for push tug and barge comprises, on the barge, a rearwardly projecting thrust receiving member having a hemispheric convex rear surface and, on the tub, a concave hemispheric thrust exerting surface. Preferably, a plurality of such thrust exerting members are disposed at vertically spaced points along the bow of the tug. An articulated joint to permit relative pitching of tug and barge is thus provided with no coupling device other than the normal chains, cables or lines, suspended in tension between the tug and barge to prevent separation thereof. Preferably, such chains, cables or lines include a hook and eye link with releasable retainer to facilitate unhooking of same, even under emergency conditions. At the rear of the barge, a deep notch with sidewalls is provided to receive the bow of the tug with fenders between these sidewalls and the adjacent tug sides to prevent relative roll between tug and barge.

Abstract: Thrust transmittal means for push tug and barge comprises, on the tug, a forwardly projecting member with a hemispheric convex frontal surface and, on the barge, a concave hemispheric thrust receiving surface. Preferably, several (or at least two) such receiving members are mounted at vertically spaced points on the rear of the barge. An articulated joint (to permit relative pitching of tug and barge) is thus provided with no coupling device other than the normal chains, cables or lines, suspended in tension between the tug and barge to prevent separation thereof. Preferably, such chains, cables or lines include a hook and eye link with a releasable retainer to facilitate unhooking of same, even under emergency conditions. At the rear of the barge, a deep notch with sidewalls is provided to receive the bow of the tug with fenders between these sidewalls and the adjacent tug sides to prevent relative roll between tug and barge.