Patents by Inventor Douglas Alan

Douglas Alan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Synthetic silica having low polarization-induced birefringence, method of making same and lithographic device comprising same
    Publication number: 20060137399
    Abstract: Disclosed are synthetic silica glass having a low polarization-induced birefringence, process for making the glass and lithography system comprising optical element made of the glass. The silica glass has a polarization-induced birefringence measured at 633 nm of less than about 0.1 nm/cm when subjected to excimer laser pulses at about 193 nm having a fluence of about 40 ?J·cm?2·pulse?1 and a pulse length of about 25 ns for 5×109 pulses.
    Type: Application
    Filed: September 30, 2005
    Publication date: June 29, 2006
    Inventors: Douglas Alan, Dana Bookbinder, Ulrich Neukirch, Charlene Smith