Patents by Inventor Douglas D. Truong

Douglas D. Truong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Transmission line RF applicator for plasma chamber
    Patent number: 9818580
    Abstract: A transmission line RF applicator apparatus and method for coupling RF power to a plasma in a plasma chamber. The apparatus comprises two conductors, one of which has a plurality of apertures. In one aspect, apertures in different portions of the conductor have different sizes, spacing or orientations. In another aspect, adjacent apertures at successive longitudinal positions are offset along the transverse dimension. In another aspect, the apparatus comprises an inner conductor and one or two outer conductors. The main portion of each of the one or two outer conductors includes a plurality of apertures that extend between an inner surface and an outer surface of the outer conductor.
    Type: Grant
    Filed: June 1, 2015
    Date of Patent: November 14, 2017
    Assignee: Applied Materials, Inc.
    Inventors: Jozef Kudela, Tsutomu Tanaka, Carl A. Sorensen, Suhail Anwar, John M. White, Ranjit Indrajit Shinde, Seon-Mee Cho, Douglas D. Truong
  • Transmission Line RF Applicator for Plasma Chamber
    Publication number: 20150340204
    Abstract: A transmission line RF applicator apparatus and method for coupling RF power to a plasma in a plasma chamber. The apparatus comprises two conductors, one of which has a plurality of apertures. In one aspect, apertures in different portions of the conductor have different sizes, spacing or orientations. In another aspect, adjacent apertures at successive longitudinal positions are offset along the transverse dimension. In another aspect, the apparatus comprises an inner conductor and one or two outer conductors. The main portion of each of the one or two outer conductors includes a plurality of apertures that extend between an inner surface and an outer surface of the outer conductor.
    Type: Application
    Filed: June 1, 2015
    Publication date: November 26, 2015
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Jozef Kudela, Tsutomu Tanaka, Carl A. Sorensen, Suhail Anwar, John M. White, Ranjit Indrajit Shinde, Seon-Mee Cho, Douglas D. Truong
  • Transmission line RF applicator for plasma chamber
    Patent number: 9048518
    Abstract: A transmission line RF applicator apparatus and method for coupling RF power to a plasma in a plasma chamber. The apparatus comprises an inner conductor and one or two outer conductors. The main portion of each of the one or two outer conductors includes a plurality of apertures that extend between an inner surface and an outer surface of the outer conductor.
    Type: Grant
    Filed: June 21, 2012
    Date of Patent: June 2, 2015
    Assignee: Applied Materials, Inc.
    Inventors: Jozef Kudela, Tsutomu Tanaka, Carl A. Sorensen, Suhail Anwar, John M. White, Ranjit Indrajit Shinde, Seon-Mee Cho, Douglas D. Truong
  • Transmission line RF applicator for plasma chamber
    Publication number: 20130221833
    Abstract: A transmission line RF applicator apparatus and method for coupling RF power to a plasma in a plasma chamber. The apparatus comprises an inner conductor and one or two outer conductors. The main portion of each of the one or two outer conductors includes a plurality of apertures that extend between an inner surface and an outer surface of the outer conductor.
    Type: Application
    Filed: June 21, 2012
    Publication date: August 29, 2013
    Inventors: Jozef Kudela, Tsutomu Tanaka, Carl A. Sorensen, Suhail Anwar, John M. White, Ranjit Indrajit Shinde, Seon-Mee Cho, Douglas D. Truong
  • Transmission Line RF Applicator for Plasma Chamber
    Publication number: 20120326592
    Abstract: A transmission line RF applicator apparatus and method for coupling RF power to a plasma in a plasma chamber. The apparatus comprises an inner conductor and one or two outer conductors. The main portion of each of the one or two outer conductors includes a plurality of apertures that extend between an inner surface and an outer surface of the outer conductor.
    Type: Application
    Filed: October 27, 2011
    Publication date: December 27, 2012
    Inventors: Jozef Kudela, Tsutomu Tanaka, Carl A. Sorensen, Suhail Anwar, John M. White, Ranjit Indrajit Shinde, Seon-Mee Cho, Douglas D. Truong