Patents by Inventor Douglas Grant Gardner

Douglas Grant Gardner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for a brush assembly
    Patent number: 5806126
    Abstract: A Method and Apparatus for Chemical Delivery Through the Brush used in semiconductor substrate cleaning processes. The chemical solutions are delivered to the core of a brush where the solution is absorbed by the brush and then applied by the brush onto the substrate. This delivery system applies the chemical solutions uniformly to the semiconductor substrate, reduces the volumes of chemical solutions used in a scrubbing process, and helps maintain control of the pH profile of a substrate. This system is described and illustrated in the manner it is used in conjunction with a scrubber that scrubs both sides of a semiconductor substrate.
    Type: Grant
    Filed: September 17, 1997
    Date of Patent: September 15, 1998
    Assignee: OnTrak Systems, Inc.
    Inventors: John Martin de Larios, Mikhail Ravkin, Douglas Grant Gardner