Abstract: A wetting tool that provides improved wettability and debris removal from features defined by a patterned resist layer on a substrate. The substrate wetting tool relies on a wetting solution having a pH of 2.0 or less and/or a temperature ranging from 20 to 50° C. With a pH of 2.0 or less, the resist material used to form features chemically reacts, making it more hydrophilic. The wetting solution is therefore attracted into the features, beneficially reducing the chance of bubble formation and removing debris. At elevated temperatures, the heated wetting solution improves particle de-lamination and aids in dissolving debris and oxides from the substrate surface.

Abstract: A system for manufacturing a forceps is disclosed. The system includes a forceps having first and second opposing jaw members. A compression mechanism is coupled to the pair of opposing jaw members and configured to provide and maintain a compression force between the opposing jaw members. The system also includes a load cell configured to measure an initial compression force between the opposing jaw members and a controller coupled to the load cell and configured to adjust the compression force based on a comparison between the initial compression force and a predetermined range.

Abstract: A system for manufacturing a forceps is disclosed. The system includes a forceps having first and second opposing jaw members. A compression mechanism is coupled to the pair of opposing jaw members and configured to provide and maintain a compression force between the opposing jaw members. The system also includes a load cell configured to measure an initial compression force between the opposing jaw members and a controller coupled to the load cell and configured to adjust the compression force based on a comparison between the initial compression force and a predetermined range.