Abstract: A wafer planarization process with a conditioning tool having an electrical insulator that electrically insulates the abrasive surface of the conditioning tool. The electrical insulator extends the useful life of the abrasive surface of the conditioning tool by reducing the level of electrochemically driven corrosion.

Abstract: A wafer planarization process with a conditioning tool having an electrical insulator that electrically insulates the abrasive surface of the conditioning tool. The electrical insulator extends the useful life of the abrasive surface of the conditioning tool by reducing the level of electrochemically driven corrosion.

Abstract: Disclosed is a fiber testing apparatus which permits creep and strength testing of one or more fibers in a controlled environment, including a vacuum, at high temperatures. Components of the fiber tester provide for accurate measurement of the effects on the fiber(s) being tested when exposed to a chosen environment. The fiber tester includes a furnace system, fiber testing system, a fixed sample, a environmental control system, a mass flow control system, a Computer Data Acquisition and Control (CDAC) system, and a support system. Most of these systems are contained in a test chamber which is part of the environmental control system. These systems of the fiber tester allow various types of mechanical tests to be performed on one or more fibers under a variety of environmental conditions not previously achievable.