Patents by Inventor Douglas L. Keith

Douglas L. Keith has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Circular magnetron sputtering device
    Patent number: 4927515
    Abstract: A circular magnetron sputtering device has a cathode structure including an annular magnet and an annular body of target material positioned coaxially with and inside of said annular magnet, and an anode structure spaced from and in juxtaposition with openings of said annular magnet. An elongated substrate is passed through the anode structure and through said cathode structure where sputtered target material is deposited on said elongated substrate.
    Type: Grant
    Filed: January 9, 1989
    Date of Patent: May 22, 1990
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventor: Douglas L. Keith
  • Planar magnetron sputtering apparatus
    Patent number: 4434042
    Abstract: A planar magnetron sputtering apparatus which minimizes contamination and controls the plasma for efficient power usage. The apparatus can be used in any orientation in most available vacuum systems. The power and coolant lines are at ambient pressure and are not exposed to the argon sputtering atmosphere. All seals in the apparatus are removed from the target area.
    Type: Grant
    Filed: March 1, 1982
    Date of Patent: February 28, 1984
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventor: Douglas L. Keith