Abstract: Apparatus and method for substrate processing are described herein. More specifically, the apparatus and method are directed towards apparatus and method for performing a field guided post exposure bake operation on a semiconductor substrate. The apparatus is a processing module (100) and includes an upper portion (102) with an electrode (400) and a base portion (104) which is configured to support a substrate (500) on a substrate support surface (159). The upper portion (102) and the base portion (104) are actuated toward and away from one another using one or more arms (112) and form a process volume (404). The process volume (404) is filled with a process fluid and the processing module (100) is rotated about an axis (A). An electric field is applied to the substrate (500) by the electrode (400) before the process fluid is drained from the process volume (404).

Abstract: New lithographic compositions for use as EUV adhesion layers are provided. The present invention provides methods of fabricating microelectronics structures using those compositions as well as structures formed by those methods. The method involves utilizing an adhesion layer immediately below the photoresist layer. The adhesion layer can either be directly applied to the substrate, or it can be applied to any intermediate layer(s) that may be applied to the substrate, such as an alpha-carbon, spin-on carbon, spin-on silicon hardmask, metal hardmask, or deposited silicon layer. The preferred adhesion layers are formed from spin-coatable, polymeric compositions. The inventive method improves adhesion and reduces or eliminates pattern collapse issues.

Abstract: A compound of Formula I, is provided. In Formula I, one of Z1, Z2, and Z3 is N and the remainder are C; each of L1 and L2 is independently selected from a direct bond and a linking group; at least one of R1, R2, RA, RB, RC, RD, and RE comprises a group R* having a structure selected form the group consisting of Formula II, -Q(R3)(R4)a(R5)b, Formula III, and Formula IV, Each R, R?, R?, R1, R2, R3, R4, R5, RA, RB, RC, RD, RE, RF, RG, and RH is independently hydrogen or a General Substituent, with the proviso that group R* is not adamantyl. Formulations, OLEDs, and consumer products containing the compound are also provided.

Abstract: A mobile device captures an object image using the built in imaging capability of the device. A structural recognition module analyzes the captured image to identify the 3D shape of the captured object. A color recognition module analyzes the color of the captured image to differentiate between objects that may be similar in shape. The image analysis information is sent to a server and the server selects an appropriate video file for augmented reality (AR) display on the mobile device. User selection of an operational language for the mobile device may also provided to the server. The system includes audio data files in different languages corresponding to each video AR file. The server selects the audio file corresponding to the language selection data provided by the mobile device. The language appropriate audio file is linked to the video file and the video and audio AR data are transmitted to the mobile device.

Abstract: A mobile device captures an object image using the built in imaging capability of the device. A structural recognition module analyzes the captured image to identify the 3D shape of the captured object. A color recognition module analyzes the color of the captured image to differentiate between objects that may be similar in shape. The image analysis information is sent to a server and the server selects an appropriate video file for augmented reality (AR) display on the mobile device. User selection of an operational language for the mobile device may also provided to the server. The system includes audio data files in different languages corresponding to each video AR file. The server selects the audio file corresponding to the language selection data provided by the mobile device. The language appropriate audio file is linked to the video file and the video and audio AR data are transmitted to the mobile device.