Abstract: Disclosed herein are a showerhead and a deposition chamber containing the showerhead. The showerhead includes a first delivery network for a first precursor that comprises a first manifold connected with a first distribution system comprising a plurality of first distribution channels concentrically disposed around an axis, and a second delivery network for a second precursor that comprises a second manifold connected with a second distributions system comprising a plurality of second distribution channels concentrically disposed around the axis. The first delivery network and the second delivery network are isolated from each other within the showerhead.

Abstract: Disclosed herein is a processing system. The processing system has an upper chamber body and a lower chamber body defining a processing environment. An upper heater is moveably disposed in the upper chamber body. The upper heater has a moveable support and an upper step formed along an outer perimeter. A lower showerhead is fixedly disposed in the lower chamber body. The lower showerhead includes a top surface configured to support a substrate, a lower step disposed along an outer perimeter wherein the substrate is configured to extend from the top surface partially over the lower step. Lift pins are disposed in the lower showerhead and configured to extend through the top surface and support the substrate thereon. Gas holes are disposed in a first zone along the top surface and a second zone on the step and configured to independently flow both a process and non-process gas.

Abstract: Embodiments of substrate supports are provided herein. In some embodiments, a substrate support for use in a chemical vapor deposition (CVD) chamber includes: a pedestal to support a substrate, wherein the pedestal includes a dielectric plate coupled to a pedestal body; an RF rotary joint coupled to the pedestal and having a RF connector; and an RF conduit that extends from the RF connector to the pedestal through a central opening of the pedestal body to provide RF bias to the pedestal; an insulator tube disposed about the RF conduit; and a ground tube disposed about the insulator tube and extending from the RF rotary joint to the pedestal, wherein the insulator tube extends vertically above an upper surface of the ground tube.

Abstract: A substrate support assembly includes a heater plate including a dielectric material, a heater electrode embedded within the heater plate, a set of distributed purge channels formed within the heater plate, wherein the set of distributed purge channels provides a set of gas flow paths to equalize a gas flow from within the heater plate and direct the gas flow in a direction below the heater plate, a ground electrode embedded within the heater plate, and a radio frequency (RF) mesh embedded within the plate.

Abstract: A mobile device captures an object image using the built in imaging capability of the device. A structural recognition module analyzes the captured image to identify the 3D shape of the captured object. A color recognition module analyzes the color of the captured image to differentiate between objects that may be similar in shape. The image analysis information is sent to a server and the server selects an appropriate video file for augmented reality (AR) display on the mobile device. User selection of an operational language for the mobile device may also provided to the server. The system includes audio data files in different languages corresponding to each video AR file. The server selects the audio file corresponding to the language selection data provided by the mobile device. The language appropriate audio file is linked to the video file and the video and audio AR data are transmitted to the mobile device.

Abstract: A mobile device captures an object image using the built in imaging capability of the device. A structural recognition module analyzes the captured image to identify the 3D shape of the captured object. A color recognition module analyzes the color of the captured image to differentiate between objects that may be similar in shape. The image analysis information is sent to a server and the server selects an appropriate video file for augmented reality (AR) display on the mobile device. User selection of an operational language for the mobile device may also provided to the server. The system includes audio data files in different languages corresponding to each video AR file. The server selects the audio file corresponding to the language selection data provided by the mobile device. The language appropriate audio file is linked to the video file and the video and audio AR data are transmitted to the mobile device.