Patents by Inventor Douglas S. Spaeth

Douglas S. Spaeth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for carrying out liquid and subsequent drying treatments on one or more wafers
    Patent number: 7556697
    Abstract: Systems for processing microelectronic substrates in a process chamber that incorporate improved technology for transitioning from a wet process to a dry process (especially transitioning from rinsing to drying). At least a portion of residual liquid remaining in fluid supply lines after a wet treatment is removed via a pathway that avoids purging directly onto the substrates. Related methods are also included in the present invention.
    Type: Grant
    Filed: June 14, 2004
    Date of Patent: July 7, 2009
    Assignee: FSI International, Inc.
    Inventors: Arne C. Benson, Erik D. Olson, Douglas S. Spaeth