Patents by Inventor Douglas Scott Armbrust

Douglas Scott Armbrust has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for making air gap insulation for semiconductor devices
    Publication number: 20020145201
    Abstract: A method and apparatus for creating air gaps to act as insulators within a semiconductor die. Wires, support structures, and sacrificial structures are constructed from vias and trenches. A top layer die is subdivided so that spaces reside between each adjacent subsection. The air gaps are created by etching the sacrificial structures via allowing etchant to seep through the spaces between subsections. After the air gaps have been created, the spaces residing between the subsections are sealed.
    Type: Application
    Filed: April 4, 2001
    Publication date: October 10, 2002
    Inventors: Douglas Scott Armbrust, Jonathan Daniel Chapple-Sokol, Anthony Kendall Stamper