Abstract: A semiconductor wafer inspection system includes a wafer chuck disposed inside a chamber and on which a wafer is disposed, a light source configured to emit light for inspecting a pattern on the wafer to the wafer, an inspection controller configured to control the driving of the light source, a cooling gas gun disposed adjacent to the light source and configured to spray a cooling gas on a surface of the wafer, and a cooling controller configured to supply cooling air to the wafer chuck before light is emitted to the wafer and supply the cooling gas to the cooling gas gun.

Abstract: A semiconductor wafer inspection system includes a wafer chuck disposed inside a chamber and on which a wafer is disposed, a light source configured to emit light for inspecting a pattern on the wafer to the wafer, an inspection controller configured to control the driving of the light source, a cooling gas gun disposed adjacent to the light source and configured to spray a cooling gas on a surface of the wafer, and a cooling controller configured to supply cooling air to the wafer chuck before light is emitted to the wafer and supply the cooling gas to the cooling gas gun.

Abstract: A semiconductor wafer inspection system includes a wafer chuck disposed inside a chamber and on which a wafer is disposed, a light source configured to emit light for inspecting a pattern on the wafer to the wafer, an inspection controller configured to control the driving of the light source, a cooling gas gun disposed adjacent to the light source and configured to spray a cooling gas on a surface of the wafer, and a cooling controller configured to supply cooling air to the wafer chuck before light is emitted to the wafer and supply the cooling gas to the cooling gas gun.

Abstract: A substrate inspection method includes: (i) acquiring a plurality of defect of interest (DOI) images of a substrate having a DOI, under a corresponding plurality of different optical conditions, (ii) acquiring a plurality of DOI difference images from differences between the plurality of DOI images and a reference image, and (iii) acquiring a plurality of DOI difference-of-difference (DOD) images from differences between the plurality of DOI difference images. The method also includes setting two optical conditions corresponding to a DOI DOD image having the highest signal-to-noise ratio (SNR) among the plurality of DOI DOD images, as a first optical condition and a second optical condition, and acquiring a first image of the substrate under the first optical condition and a second image of the substrate under the second optical condition.

Abstract: An alignment key pattern includes an origin alignment mark having a cross shape and a rotation angle measurement mark (RAMM) having a radial shape. The RAMM includes a plurality of radially-extending bars that are aligned to a common center point. These radially-extending bars include at least two horizontal bars, which extend horizontally and are spaced apart from each other, a vertical bar configured to be perpendicular to and spaced apart from the horizontal bars, and diagonal bars configured to have a first angle with respect to and be spaced apart from the horizontal bars and the vertical bar.

Abstract: The present invention relates to a hybridoma cell line producing a PPAR gamma-specific monoclonal antibody, and a method for detecting a PPAR gamma ligand related to the progression of difficult diseases, such as cancer, inflammation and metabolic diseases obesity and diabetes), using the PPAR gamma-specific monoclonal antibody. This PPAR gamma-specific monoclonal antibody and the method for screening a PPAR gamma ligand using the monoclonal antibody will be commercially used for screening a PPAR gamma regulator related to diseases such as inflammatory, cancer and metabolic diseases, and also will serve as an useful tool for analyzing the function of such a ligand.

Abstract: The present invention relates to a hybridoma cell line producing a PPAR gamma-specific monoclonal antibody, and a method for detecting a PPAR gamma ligand related to the progression of difficult diseases, such as cancer, inflammation and metabolic diseases obesity and diabetes), using the PPAR gamma-specific monoclonal antibody. This PPAR gamma-specific monoclonal antibody and the method for screening a PPAR gamma ligand using the monoclonal antibody will be commercially used for screening a PPAR gamma regulator related to diseases such as inflammatory, cancer and metabolic diseases, and also will serve as an useful tool for analyzing the function of such a ligand.

Abstract: A small-scale scrapped tire boiler system for heating a small-scale facility using heat generated by burning scrapped tires. The system includes a scrapped tire burner furnace, a heat exchanger for heating a cool heat transfer medium from the facility by the combustion gas from the furnace and supplying the heated medium to the facility, and an exhaust gas purifier for purifying sulfurous acid gas and carbon dust contained in exhaust gas. The purifier includes an exhaust gas tower having a vertical path to discharge the combustion gas, a water sprayer for spraying water from the upper side of the tower so that the sulfurous acid gas is made to melt to water and the carbon dust is made to adsorb to fall down, a neutralizer for precipitating sulfurous acid gas components into alkali salts in a sulfurous acid aqueous solution to thereby neutralize water, and a tank containing the solution and water.