Patents by Inventor Dragos Pariza

Dragos Pariza has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pneumatic bearing with bonded polymer film wear surface and production method thereof
    Patent number: 10267360
    Abstract: Disclosed are pneumatic bearings with a bonded polymer film wear surface and production methods thereof. For example, a pneumatic bearing for supporting a payload is disclosed. The pneumatic bearing has a bearing surface having a polyimide film fastened to a substrate with a bonding layer. The polyimide film can comprise poly-oxydiphenylene-pyromellitimide and the bonding layer can comprise diglycidyl ether of bisphenol A, 1,4-butanediol diglycidyl ether, and 2,2,4-trimetylhexametylen-1,6-diamin.
    Type: Grant
    Filed: April 6, 2011
    Date of Patent: April 23, 2019
    Assignee: ASML Holding N.V.
    Inventors: Dragos Pariza, Santiago E. Del Puerto
  • Pneumatic Bearing with Bonded Polymer Film Wear Surface and Production Method thereof
    Publication number: 20130108203
    Abstract: Disclosed are pneumatic bearings with a bonded polymer film wear surface and production methods thereof. For example, a pneumatic bearing for supporting a payload is disclosed. The pneumatic bearing has a bearing surface having a polyimide film fastened to a substrate with a bonding layer. The polyimide film can comprise poly-oxydiphenylene-pyromellitimide and the bonding layer can comprise diglycidyl ether of bisphenol A, 1,4-butanediol diglycidyl ether, and 2,2,4-trimetylhexametylen-1,6-diamin.
    Type: Application
    Filed: April 6, 2011
    Publication date: May 2, 2013
    Applicant: ASML Holdings N.V.
    Inventors: Dragos Pariza, Santiago E. Del Puerto
  • Apparatus for mounting two or more elements and method for processing the surface of an optical element
    Patent number: 7800849
    Abstract: In an apparatus for mounting two or more optical elements that are each held in an individual mount or in a support structure, said optical elements are mounted in a common mount. The relative positioning of the optical elements (10, 11) in the common mount (18) can be set.
    Type: Grant
    Filed: February 1, 2008
    Date of Patent: September 21, 2010
    Assignee: Carl Zeiss SMT AG
    Inventors: Hubert Holderer, Thomas Petasch, Chris Reed, Dragos Pariza, Mike Meehan, Gary Krebs
  • APPARATUS FOR MOUNTING TWO OR MORE ELEMENTS AND METHOD FOR PROCESSING THE SURFACE OF AN OPTICAL ELEMENT
    Publication number: 20090015947
    Abstract: In an apparatus for mounting two or more optical elements that are each held in an individual mount or in a support structure, said optical elements are mounted in a common mount. The relative positioning of the optical elements (10, 11) in the common mount (18) can be set.
    Type: Application
    Filed: December 22, 2005
    Publication date: January 15, 2009
    Inventors: Hubert Holderer, Thomas Petasch, Chris Reed, Dragos Pariza, Mike Meehan, Gary Krebs
  • Device for holding a beam splitter element
    Patent number: 7079331
    Abstract: The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at least one support element that is fastened in the housing of the imaging device. The connection between the beam splitter element and said at least one support element is designed in such a way that the position of the beam splitter layer of the beam splitter element remains nearly constant relative to the housing independently of temperatures and of thermal stresses acting upon the beam splitter element.
    Type: Grant
    Filed: April 19, 2005
    Date of Patent: July 18, 2006
    Assignee: Carl Zeiss SMT AG
    Inventors: Ulrich Weber, Alexander Kohl, Hubert Holderer, Armin Schoeppach, Erwin Gaber, Winfried Kaiser, Reiner Garreis, Toralf Gruner, Chris Reed, Dragos Pariza, Mike Meehan
  • Device for holding a beam splitter element
    Publication number: 20050248858
    Abstract: The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at least one support element that is fastened in the housing of the imaging device. The connection between the beam splitter element and said at least one support element is designed in such a way that the position of the beam splitter layer of the beam splitter element remains nearly constant relative to the housing independently of temperatures and of thermal stresses acting upon the beam splitter element.
    Type: Application
    Filed: April 19, 2005
    Publication date: November 10, 2005
    Applicant: Carl Zeiss SMT AG
    Inventors: Ulrich Weber, Alexander Kohl, Hubert Holderer, Armin Schoeppach, Erwin Gaber, Winfried Kaiser, Reiner Garreis, Toralf Gruner, Chris Reed, Dragos Pariza, Mike Meehan