Patents by Inventor Drew Procyk

Drew Procyk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Focused ion beam system
    Patent number: 6710338
    Abstract: A portion of an ion optical column is formed using a dielectric bushing to support metallic optical elements, electrically isolate them, and form a vacuum chamber around those elements. In particular, the dielectric bushing is suitable for forming an ion gun vacuum chamber in which are contained an emitter assembly and other optical elements, the gun vacuum chamber preferably being vacuum sealable separately from the system vacuum chamber. A compact ion column includes, within the system vacuum chamber, an automated variable aperture drive mechanism and a gun chamber vacuum isolation valve activation mechanism. Including these mechanisms within the vacuum chamber facilitates the design of multi-beam systems by eliminating mechanical feedthroughs that would interfere with the placement of other components in the vacuum chamber.
    Type: Grant
    Filed: October 17, 2001
    Date of Patent: March 23, 2004
    Assignee: Fei Company
    Inventors: Robert L. Gerlach, Paul Tesch, Noel Paul Martin, Walter Skoczylas, Drew Procyk
  • Focused ion beam system
    Publication number: 20020084426
    Abstract: A portion of an ion optical column is formed using a dielectric bushing to support metallic optical elements, electrically isolate them, and form a vacuum chamber around those elements. In particular, the dielectric bushing is suitable for forming an ion gun vacuum chamber in which are contained an emitter assembly and other optical elements, the gun vacuum chamber preferably being vacuum sealable separately from the system vacuum chamber. A compact ion column includes, within the system vacuum chamber, an automated variable aperture drive mechanism and a gun chamber vacuum isolation valve activation mechanism. Including these mechanisms within the vacuum chamber facilitates the design of multi-beam systems by eliminating mechanical feedthroughs that would interfere with the placement of other components in the vacuum chamber.
    Type: Application
    Filed: October 17, 2001
    Publication date: July 4, 2002
    Inventors: Robert L. Gerlach, Paul Tesch, Noel Paul Martin, Walter Skoczylas, Drew Procyk