Abstract: A system for differentiating particulate contamination from defects on a surface of a specimen includes an illumination source configured to illuminate the specimen with a light at a predetermined angle relative to the surface of the specimen, an image recording device configured to capture the light reflected from the surface of the specimen in a sensor image, and an evaluation unit configured to receive deflectometry or phase-shifted deflectometry (PSD) image data and dust channel image data from the image recording device, correlate the PSD image data and dust channel image data, and separately output first result information and second result information, the first result information including defect identification information and defect location information and the second result information including contamination identification information and contamination location information.

Abstract: A multi-color system for optically inspecting a surface of a specimen includes a multi-wavelength led array to illuminate the specimen with a multi-color light pattern including simultaneously emitted spatial intensity color image patterns, each of which has first areas in which light is emitted with a first light intensity and second areas in which the light is emitted with a second light intensity, the first light intensity being higher than the second light intensity, and corresponding first and second areas in each of the simultaneously emitted spatial intensity color image patterns being phase-shifted relative to each other. A multi-color sensor captures each of the simultaneously emitted spatial intensity color image patterns reflected from the surface of the specimen in a single wavelength-multiplexed sensor image, and a data processing apparatus in communication with the multi-color sensor determines properties of the surface based on an evaluation of the single wavelength-multiplexed sensor image.

Abstract: A system for inspecting a surface of a specimen includes a normal incidence phase-shifted deflectometry (PSD) sensor including an imaging sensor, a beam splitter, and an imaging optic arranged between the imaging sensor and the beam splitter. The illumination source illuminates the specimen with a light pattern and is arranged perpendicular to the surface of the specimen. The imaging sensor captures the light pattern reflected from the surface of the specimen in a sensor image. The beam splitter directs a first portion of the light from the illumination source to the optical absorber, a second portion of the light from the illumination source to the surface of the specimen, and the light pattern reflected from the surface of the specimen to the imaging sensor. A data processing apparatus in communication with the normal incidence PSD sensor determines properties of the surface of the specimen based on the sensor image.

Abstract: A device for optically inspecting a surface of a sample includes: a screen providing a first light profile pattern formed with lighter and darker areas wherein the areas form a first spatial intensity profile having a first spatial period, a holder for positioning the sample with the surface relative to the first pattern such that the first pattern is reflected by the surface, an auxiliary lens and/or curved mirror arranged between the screen and the holder for providing a second light profile pattern having areas which form a second spatial intensity profile with a second spatial period when at least a part of the first pattern passes the lens or is reflected by the mirror, an image recording unit for receiving an image of the second pattern reflected from the surface of the sample, and an evaluation unit for determining properties of the surface in dependence on the image.

Abstract: A device for optically inspecting a surface of a sample includes: a screen providing a first light profile pattern formed with lighter and darker areas wherein the areas form a first spatial intensity profile having a first spatial period, a holder for positioning the sample with the surface relative to the first pattern such that the first pattern is reflected by the surface, an auxiliary lens and/or curved mirror arranged between the screen and the holder for providing a second light profile pattern having areas which form a second spatial intensity profile with a second spatial period when at least a part of the first pattern passes the lens or is reflected by the mirror, an image recording unit for receiving an image of the second pattern reflected from the surface of the sample, and an evaluation unit for determining properties of the surface in dependence on the image.