Patents by Inventor Du-Han Jeon

Du-Han Jeon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Batch type apparatus for manufacturing semiconductor devices
    Patent number: 9159591
    Abstract: A batch type apparatus may include a tube; a boat configured to receive a plurality of semiconductor substrates, the boat vertically moved into the tube; a gas nozzle vertically arranged in the tube, the tube having a first portion and a second portion upwardly extended from the first portion; a gas pipe for supplying reaction gases to the gas nozzle, the gas pipe having a horizontal extension and a vertical extension, and the vertical extension extended in the gas nozzle; a fixing member for fixing the first portion of the gas nozzle to the gas pipe, the fixing member having strength higher than that of the gas nozzle; and a clamping member for clamping the gas pipe to the tube. Therefore, breakage of the gas nozzle may be suppressed.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: October 13, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Cheol-Kyu Yang, Seog-Min Lee, Chul-Young Jang, Dong-Min Son, Byung-Ho Ahn, Du-Han Jeon, Yong-Kyu Joo, Sang-Cheol Ha
  • BATCH TYPE APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES
    Publication number: 20130167774
    Abstract: A batch type apparatus may include a tube; a boat configured to receive a plurality of semiconductor substrates, the boat vertically moved into the tube; a gas nozzle vertically arranged in the tube, the tube having a first portion and a second portion upwardly extended from the first portion; a gas pipe for supplying reaction gases to the gas nozzle, the gas pipe having a horizontal extension and a vertical extension, and the vertical extension extended in the gas nozzle; a fixing member for fixing the first portion of the gas nozzle to the gas pipe, the fixing member having strength higher than that of the gas nozzle; and a clamping member for clamping the gas pipe to the tube. Therefore, breakage of the gas nozzle may be suppressed.
    Type: Application
    Filed: September 13, 2012
    Publication date: July 4, 2013
    Inventors: Cheol-Kyu Yang, Seong-Min Lee, Chul-Young Jang, Dong-Min Son, Byung-Ho Ahn, Du-Han Jeon, Yong-Kyu Joo, Sang-Cheol Ha