Patents by Inventor Du WANG

Du WANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240128089
    Abstract: Embodiments of improved processes and methods that provide selective etching of silicon nitride are disclosed herein. More specifically, a cyclic, two-step dry etch process is provided to selectively etch silicon nitride layers formed on a substrate, while protecting oxide layers formed on the same substrate. The cyclic, two-step dry etch process sequentially exposes the substrate to: (1) a hydrogen plasma to modify exposed surfaces of the silicon nitride layer and the oxide layer to form a modified silicon nitride surface layer and a modified oxide surface layer, and (2) a halogen plasma to selectively etch silicon nitride by removing the modified silicon nitride surface layer without removing the modified oxide surface layer. The oxide layer is protected from etching during the removal step (i.e., step 2) by creating a crystallized water layer on the oxide layer during the surface modification step (i.e., step 1).
    Type: Application
    Filed: October 18, 2022
    Publication date: April 18, 2024
    Inventors: Yu-Hao Tsai, Mingmei Wang, Du Zhang
  • Publication number: 20240112919
    Abstract: A method of processing a substrate that includes: flowing dioxygen (O2) and a hydrogen-containing gas into a plasma processing chamber that is configured to hold the substrate, the substrate including an organic layer and a patterned etch mask, the hydrogen-containing gas including dihydrogen (H2), a hydrocarbon, or hydrogen peroxide (H2O2); generating an oxygen-rich plasma while flowing the gases; maintaining a temperature of the substrate in the plasma processing chamber between ?150° C. and ?50° C.; and while maintaining the temperature, exposing the substrate to the oxygen-rich plasma to form a recess in the organic layer.
    Type: Application
    Filed: September 29, 2022
    Publication date: April 4, 2024
    Inventors: Du Zhang, Maju Tomura, Koki Mukaiyama, Tomohiko Niizeki, Yoshihide Kihara, Mingmei Wang
  • Publication number: 20240112888
    Abstract: A method of processing a substrate that includes: flowing an etch gas, O2, and an adsorbate precursor into a plasma processing chamber that is configured to hold the substrate including a silicon-containing dielectric layer and a patterned mask layer, the etch gas including hydrogen and fluorine; generating a plasma in the plasma processing chamber while flowing the etch gas, O2, and the adsorbate precursor, the adsorbate precursor being oxidized to form an adsorbate; and patterning, with the plasma, the silicon-containing dielectric layer on the substrate, where the adsorbate forms a sidewall passivation layer.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Inventors: Du Zhang, Yu-Hao Tsai, Masahiko Yokoi, Mingmei Wang, Yoshihide Kihara
  • Publication number: 20240112887
    Abstract: A method of processing a substrate that includes: flowing dioxygen (O2) and an adsorbate precursor into a plasma processing chamber that is configured to hold the substrate including an organic layer and a patterned etch mask; sustaining an oxygen-rich plasma while flowing the O2 and the adsorbate precursor, oxygen species from the O2 and the adsorbate precursor reacting under the oxygen-rich plasma to form an adsorbate; and exposing the substrate to the oxygen-rich plasma to form a recess in the organic layer, where the adsorbate forms a sidewall passivation layer in the recess.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Inventors: Du Zhang, Yu-Hao Tsai, Masahiko Yokoi, Yoshihide Kihara, Mingmei Wang
  • Patent number: 11635429
    Abstract: An immunochromatography test strip for detecting pollution of diacetoxyscirpenol includes a bottom plate, where a water absorption pad, a detection pad, a gold-labeled pad and a sample pad are sequentially attached to one side of the bottom plate from top to bottom, adjacent pads are connected in an overlapping manner at a joint, the detection pad uses a nitrocellulose membrane as a base pad, a quality control line and a detection line are transversely arranged on the nitrocellulose membrane, the quality control line is coated with a rabbit antimouse polyclonal antibody, the detection line is located below the quality control line, and the detection line is coated with a diacetoxyscirpenol-ovalbumin conjugate; the gold-labeled pad is transversely spray-coated with a nanogold-labeled anti-diacetoxyscirpenol monoclonal antibody; and the anti-diacetoxyscirpenol monoclonal antibody is secreted by a hybridoma cell strain DAS5G11E7 with the preservation number of CCTCC NO.C201881.
    Type: Grant
    Filed: November 16, 2020
    Date of Patent: April 25, 2023
    Assignee: OIL CROPS RESEARCH INSTITUTE, CHINESE ACADEMY OF AGRICULTURAL SCIENCES
    Inventors: Xiaoqian Tang, Du Wang, Jun Jiang, Qi Zhang, Peiwu Li
  • Publication number: 20220404352
    Abstract: An immunochromatography test strip for detecting pollution of diacetoxyscirpenol includes a bottom plate, where a water absorption pad, a detection pad, a gold-labeled pad and a sample pad are sequentially attached to one side of the bottom plate from top to bottom, adjacent pads are connected in an overlapping manner at a joint, the detection pad uses a nitrocellulose membrane as a base pad, a quality control line and a detection line are transversely arranged on the nitrocellulose membrane, the quality control line is coated with a rabbit antimouse polyclonal antibody, the detection line is located below the quality control line, and the detection line is coated with a diacetoxyscirpenol-ovalbumin conjugate; the gold-labeled pad is transversely spray-coated with a nanogold-labeled anti-diacetoxyscirpenol monoclonal antibody; and the anti-diacetoxyscirpenol monoclonal antibody is secreted by a hybridoma cell strain DAS5G11E7 with the preservation number of CCTCC NO.C201881.
    Type: Application
    Filed: November 16, 2020
    Publication date: December 22, 2022
    Applicant: OIL CROPS RESEARCH INSTITUTE, CHINESE ACADEMY OF AGRICULTURAL SCIENCES
    Inventors: Xiaoqian TANG, Du WANG, Jun JIANG, Qi ZHANG, Peiwu LI
  • Publication number: 20210132066
    Abstract: A time-resolved fluorescence immunochromatographic kit for simultaneous detection of mixed contamination of five mycotoxins such as aflatoxin B1 and an application thereof are disclosed. The kit comprises a time-resolved fluorescent immunochromatographic test strip and sample reaction vials each containing a europium-labeled monoclonal antibody lyophilized product; wherein the fluorescent test strip comprises a PVC substrate, and a surface of the PVC substrate is adhered with a water absorbing pad (1), a detection pad (2) and a sample pad (3) from top to bottom, adjacent pads being connected and overlapping at connections. The detection pad (2) adopts a nitrocellulose membrane as the base thereof and is arranged with a lateral quality control line (5) and five detection lines (5, 6, 7, 8, 9) from top to bottom each covered by a bovine serum albumin conjugate of each toxin.
    Type: Application
    Filed: March 7, 2018
    Publication date: May 6, 2021
    Inventors: Zhaowei ZHANG, Peiwu LI, Qi ZHANG, Du WANG, Wen ZHANG
  • Patent number: 10976247
    Abstract: The invention discloses a NIR method for fatty acid content of oilseeds, including: selection of oilseed samples, and analyzing the oilseed samples by an near infrared spectrometer to obtain NIR spectra; preprocessing of NIR spectra and establishment of a NIR spectral database of oilseeds; establishment of a fatty acid database of oilseeds based on gas chromatography; establishment of prediction model of fatty acids in oilseeds; acquiring NIR spectrum of a sample to be tested by the near infrared spectrometer, and importing the preprocessed NIR spectrum into the prediction model of fatty acids to obtain the predicted fatty acid content of the tested sample. The method is simple and rapid to operate and is non-destructive, and the detection time of the sample is greatly shortened and the detection cost is reduced.
    Type: Grant
    Filed: August 8, 2019
    Date of Patent: April 13, 2021
    Assignee: OIL CROPS RESEARCH INSTITUTE, CHINESE ACADEMY OF ARGICULTURAL SCIENCES
    Inventors: Liangxiao Zhang, Peiwu Li, Zhe Yuan, Du Wang, Xuefang Wang, Wen Zhang, Qi Zhang
  • Patent number: 10948407
    Abstract: A method for multivariate adulteration detection on an edible oil includes (1) construction of a model: S1, acquiring near-infrared spectra of edible oils; S2, establishing a near-infrared spectral database of the edible oils; S3, establishing a multivariate adulteration detection model for a type of edible oil; and (2) application of the model: acquiring spectra of a sample to be tested according to the near-infrared spectral signal acquisition method in step S1, preprocessing the obtained near-infrared spectra by using the method in step S2 to obtain near-infrared spectral data of the sample, and determining the authenticity of the sample to be tested by using the multivariate adulteration detection model for the edible oil established in step S3. The method is simple and rapid in operation, can effectively and rapidly screen the authenticity of an edible vegetable oil, and has strong practicability.
    Type: Grant
    Filed: November 21, 2018
    Date of Patent: March 16, 2021
    Assignee: OIL CROPS RESEARCH INSTITUTE, CHINESE ACADAMY OF AGRICULTURAL SCIENCES
    Inventors: Liangxiao Zhang, Peiwu Li, Zhe Yuan, Du Wang, Xuefang Wang, Wen Zhang, Qi Zhang
  • Publication number: 20200049623
    Abstract: The invention discloses a NIR method for fatty acid content of oilseeds, including: selection of oilseed samples, and analyzing the oilseed samples by an near infrared spectrometer to obtain NIR spectra; preprocessing of NIR spectra and establishment of a NIR spectral database of oilseeds; establishment of a fatty acid database of oilseeds based on gas chromatography; establishment of prediction model of fatty acids in oilseeds; acquiring NIR spectrum of a sample to be tested by the near infrared spectrometer, and importing the preprocessed NIR spectrum into the prediction model of fatty acids to obtain the predicted fatty acid content of the tested sample. The method is simple and rapid to operate and is non-destructive, and the detection time of the sample is greatly shortened and the detection cost is reduced.
    Type: Application
    Filed: August 8, 2019
    Publication date: February 13, 2020
    Inventors: Liangxiao ZHANG, Peiwu LI, Zhe YUAN, Du WANG, Xuefang WANG, Wen ZHANG, Qi ZHANG
  • Publication number: 20190162658
    Abstract: A method for multivariate adulteration detection on an edible oil includes (1) construction of a model: S1, acquiring near-infrared spectra of edible oils; S2, establishing a near-infrared spectral database of the edible oils; S3, establishing a multivariate adulteration detection model for a type of edible oil; and (2) application of the model: acquiring spectra of a sample to be tested according to the near-infrared spectral signal acquisition method in step S1, preprocessing the obtained near-infrared spectra by using the method in step S2 to obtain near-infrared spectral data of the sample, and determining the authenticity of the sample to be tested by using the multivariate adulteration detection model for the edible oil established in step S3. The method is simple and rapid in operation, can effectively and rapidly screen the authenticity of an edible vegetable oil, and has strong practicability.
    Type: Application
    Filed: November 21, 2018
    Publication date: May 30, 2019
    Inventors: Liangxiao ZHANG, Peiwu LI, Zhe YUAN, Du WANG, Xuefang WANG, Wen ZHANG, Qi ZHANG