Patents by Inventor Du Won LEE

Du Won LEE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240132386
    Abstract: The present invention relates to a water treatment device, and more specifically to a water purifier capable of removing scale in a simple manner.
    Type: Application
    Filed: October 12, 2023
    Publication date: April 25, 2024
    Applicant: COWAY Co., Ltd.
    Inventors: Si Jun PARK, Hyun Suk MOON, Sang-Young LEE, Doo Won HAN, Jung Chul PARK, In Du CHOI
  • Patent number: 11220659
    Abstract: A thinner composition is capable of reducing the amount of photoresist used in a reducing resist consumption (RRC) coating process, an edge bead removed (EBR) process or the like, and removing unnecessary photoresist on an edge portion or a backside portion of the wafer. The thinner composition includes C1-C10 alkyl C1-C10 alkoxy propionate, propylene glycol C1-C10 alkyl ether, and propylene glycol C1-C10 alkyl ether acetate.
    Type: Grant
    Filed: August 29, 2019
    Date of Patent: January 11, 2022
    Assignee: ENF TECHNOLOGY CO., LTD.
    Inventors: Du Won Lee, Sang Dae Lee, Myung Ho Lee, Myung Geun Song
  • Patent number: 11149201
    Abstract: Provided is a silicon nitride layer etching composition, and more specifically, a silicon nitride layer etching composition including two different silicon-based compounds in an etching composition to be capable of selectively etching a silicon nitride layer relative to a silicon oxide layer with a remarkable etch selectivity ratio and providing remarkable effects of suppressing generation of precipitates and reducing the abnormal growth of other layers existing in the vicinity, including the silicon oxide layer when the silicon nitride layer etching composition is used for an etching process and a semiconductor manufacturing process.
    Type: Grant
    Filed: May 17, 2019
    Date of Patent: October 19, 2021
    Assignee: ENF TECHNOLOGY CO., LTD.
    Inventors: Dong Hyun Kim, Hyeon Woo Park, Du Won Lee, Jang Woo Cho, Myung Ho Lee, Myung Geun Song
  • Patent number: 10920142
    Abstract: Provided are a polysiloxane-based compound, a selective etching composition with respect to a silicon nitride layer including the polysiloxane-based compound, and a method of manufacturing a semiconductor device including the etching composition. The silicon nitride layer etching composition including the polysiloxane-based compound may selectively etch the silicon nitride layer relative to a silicon oxide layer, and have a significantly excellent etch selectivity ratio, and a small change in etch rate and a small change in etch selectivity ratio with respect to the silicon nitride layer even when time for using the composition increases or the composition is repeatedly used.
    Type: Grant
    Filed: June 7, 2019
    Date of Patent: February 16, 2021
    Assignee: ENF TECHNOLOGY CO., LTD.
    Inventors: Dong Hyun Kim, Hyeon Woo Park, Du Won Lee, Jang Woo Cho, Myung Ho Lee
  • Publication number: 20200071640
    Abstract: A thinner composition is capable of reducing the amount of photoresist used in a reducing resist consumption (RRC) coating process, an edge bead removed (EBR) process or the like, and removing unnecessary photoresist on an edge portion or a backside portion of the wafer. The thinner composition includes C1-C10 alkyl C1-C10 alkoxy propionate, propylene glycol C1-C10 alkyl ether, and propylene glycol C1-C10 alkyl ether acetate.
    Type: Application
    Filed: August 29, 2019
    Publication date: March 5, 2020
    Inventors: Du Won LEE, Sang Dae LEE, Myung Ho LEE, Myung Geun SONG
  • Publication number: 20190390110
    Abstract: Provided is a silicon nitride layer etching composition, and more specifically, a silicon nitride layer etching composition including two different silicon-based compounds in an etching composition to be capable of selectively etching a silicon nitride layer relative to a silicon oxide layer with a remarkable etch selectivity ratio and providing remarkable effects of suppressing generation of precipitates and reducing the abnormal growth of other layers existing in the vicinity, including the silicon oxide layer when the silicon nitride layer etching composition is used for an etching process and a semiconductor manufacturing process.
    Type: Application
    Filed: May 17, 2019
    Publication date: December 26, 2019
    Inventors: Dong Hyun KIM, Hyeon Woo PARK, Du Won LEE, Jang Woo CHO, Myung Ho LEE, Myung Geun SONG
  • Publication number: 20190382659
    Abstract: Provided are a polysiloxane-based compound, a selective etching composition with respect to a silicon nitride layer including the polysiloxane-based compound, and a method of manufacturing a semiconductor device including the etching composition. The silicon nitride layer etching composition including the polysiloxane-based compound may selectively etch the silicon nitride layer relative to a silicon oxide layer, and have a significantly excellent etch selectivity ratio, and a small change in etch rate and a small change in etch selectivity ratio with respect to the silicon nitride layer even when time for using the composition increases or the composition is repeatedly used.
    Type: Application
    Filed: June 7, 2019
    Publication date: December 19, 2019
    Inventors: Dong Hyun KIM, Hyeon Woo PARK, Du Won LEE, Jang Woo CHO, Myung Ho LEE