Abstract: Methods for configuring a patterning process based on results of another patterning process is described. The method includes obtaining a first set of contours by simulating a first patterning process using a design layout in a first orientation. The contours satisfy a design specification associated with the design layout and correspond to a first set of process window conditions. A second patterning process is configured based on a second orientation of the design layout, the first set of process window conditions and the first set of contours. The second patterning process is associated with one or more design variables (e.g., illumination, mask pattern) that affect a second set of contours. The configuring includes adjusting one or more design variables until the second set of contours are within a desired matching threshold with the first set of contours.

Abstract: A signal generator and a method which provides a source signal with a coherent phase at arbitrary times is presented. There is provided a signal generator for generating a source signal based on a reference signal. The signal generator has a phase setting circuit with a memory circuit operable between a plurality of states. The memory circuit has a phase setting input adapted to receive a phase setting value to set the memory circuit to a known state. The signal generator is adapted to load the phase setting value at a specific time to control a phase of the source signal.

Abstract: There is provided a signal generator and associated method for generating a source signal. The signal generator includes a frequency generator for providing an oscillating signal, a phase comparator, a first phase modulator, a second phase modulator and a phase shifter. The phase comparator is adapted to compare a phase signal with a feedback signal and to generate an error signal to control the phase of the oscillating signal. The first and second phase modulators are adapted to provide a first phase control word and a second phase control word respectively. The phase shifter is adapted to modulate the oscillating signal based on the second phase control word to generate the source signal. The source signal comprises the feedback signal.