Patents by Inventor DUC BUCKIUS

DUC BUCKIUS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for calibrating flow controllers in substrate processing systems
    Patent number: 8707754
    Abstract: Methods and apparatus for calibrating a plurality of gas flows in a substrate processing system are provided herein. In some embodiments, a substrate processing system may include a cluster tool comprising a first process chamber and a second process chamber coupled to a central vacuum transfer chamber; a first flow controller to provide a process gas to the first process chamber; a second flow controller to provide the process gas to the second process chamber; a mass flow verifier to verify a flow rate from each of the first and second flow controllers; a first conduit to selectively couple the first flow controller to the mass flow verifier; and a second conduit to selectively couple the second flow controller to the mass flow verifier.
    Type: Grant
    Filed: October 29, 2010
    Date of Patent: April 29, 2014
    Assignee: Applied Materials, Inc.
    Inventors: James P. Cruse, John W. Lane, Mariusch Gregor, Duc Buckius, Berrin Daran, Corie Lynn Cobb, Ming Xu, Andrew Nguyen
  • METHODS AND APPARATUS FOR CALIBRATING FLOW CONTROLLERS IN SUBSTRATE PROCESSING SYSTEMS
    Publication number: 20110265549
    Abstract: Methods and apparatus for calibrating a plurality of gas flows in a substrate processing system are provided herein. In some embodiments, a substrate processing system may include a cluster tool comprising a first process chamber and a second process chamber coupled to a central vacuum transfer chamber; a first flow controller to provide a process gas to the first process chamber; a second flow controller to provide the process gas to the second process chamber; a mass flow verifier to verify a flow rate from each of the first and second flow controllers; a first conduit to selectively couple the first flow controller to the mass flow verifier; and a second conduit to selectively couple the second flow controller to the mass flow verifier.
    Type: Application
    Filed: October 29, 2010
    Publication date: November 3, 2011
    Applicant: APPLIED MATERIALS, INC.
    Inventors: JAMES P. CRUSE, JOHN W. LANE, MARIUSCH GREGOR, DUC BUCKIUS, BERRIN DARAN, CORIE LYNN COBB, MING XU, ANDREW NGUYEN