Patents by Inventor Duk-soo Yoon

Duk-soo Yoon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of depositing film for semiconductor device in single wafer type apparatus using a lamp heating method
    Patent number: 6133148
    Abstract: A method of depositing a thin film for a semiconductor device using a lamp heating type apparatus. In the method, a wafer is loaded into a processing chamber of the apparatus, and the pressure of the chamber and the temperature of a susceptor installed in the chamber are increased to a level higher than a deposition pressure and a deposition temperature, respectively. Then, the pressure of the chamber and the temperature of the susceptor are decreased to the deposition pressure and the deposition temperature, respectively, and a film is deposited on the wafer. The vacuum of the chamber is then released and the gas remaining in the chamber and a source gas injection tube is purged.
    Type: Grant
    Filed: November 3, 1998
    Date of Patent: October 17, 2000
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Seok-jun Won, Kyoung-hoon Kim, Young-wook Park, Kab-jin Nam, Duk-soo Yoon, Sun-woo Kwak