Patents by Inventor Dung-Yue Su

Dung-Yue Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240351881
    Abstract: A method for forming a pellicle for an extreme ultraviolet lithography is provided. The method includes forming a pellicle membrane over a filter membrane and transfer the pellicle membrane from the filter membrane to a membrane border. Forming the pellicle membrane includes growing carbon nanotubes (CNTs) from in-situ formed metal catalyst particles in a first reaction zone of a reactor, each of the CNTs including a metal catalyst particle at a growing tip thereof, promoting formation of bundles of nanotubes from the individual CNTs in a second zone of the reactor downstream of the first reaction zone. The bundled CNTs are then collected on the filter membrane.
    Type: Application
    Filed: July 24, 2023
    Publication date: October 24, 2024
    Inventors: Dung-Yue SU, Pei-Cheng HSU, Huan-Ling LEE, Hsin-Chang LEE
  • Patent number: 10077351
    Abstract: A graphene dispersion includes a graphene material and a polymerizable monomer. The polymerizable monomer has a structure including the first part and the second part. The first part is at one end of the structure and includes at least one benzene ring, and the second part is at another end of the structure and has polarity.
    Type: Grant
    Filed: December 23, 2016
    Date of Patent: September 18, 2018
    Assignee: Angstron Materials (Asia) Limited
    Inventors: Bor Z. Jang, Aruna Zhamu, Feng-Yu Tsai, Dung-Yue Su, Che-Chen Hsu, Guo-Cyuan Fang, Hung-Wei Liu, Fan-Chun Meng, Chin-Chuan Chang
  • Publication number: 20180179359
    Abstract: A graphene dispersion includes a graphene material and a polymerizable monomer. The polymerizable monomer has a structure including the first part and the second part. The first part is at one end of the structure and includes at least one benzene ring, and the second part is at another end of the structure and has polarity.
    Type: Application
    Filed: December 23, 2016
    Publication date: June 28, 2018
    Inventors: Bor Z. Jang, ARUNA ZHAMU, Feng-Yu Tsai, Dung-Yue Su, Che-Chen Hsu, Guo-Cyuan Fang, Hung-Wei Liu, Fan-Chun Meng, Chin-Chuan Chang