Patents by Inventor Duocai SUN

Duocai SUN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEM, METHOD AND DEVICE FOR TEMPERATURE CONTROL
    Publication number: 20230029782
    Abstract: A method for temperature control includes: acquiring the present temperature of a reaction window in a process chamber of a semiconductor machine; comparing the present temperature with the preset temperature to acquire a comparison result; and adjusting the exhaust amount of an exhaust passage of the process chamber based on the comparison result to control the temperature of the reaction window.
    Type: Application
    Filed: January 12, 2022
    Publication date: February 2, 2023
    Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Guoqing ZHANG, Su YANG, Duocai SUN, Xingfeng HONG, Yiqun LI