Abstract: A method and apparatus for producing schedules for a wafer in a multichamber semiconductor wafer processing tool comprising the steps of providing a trace defining a series of chambers that are visited by a wafer as the wafer is processed by the tool; initializing a sequence generator with a vertex defining initial wafer positioning within the tool; generating all successor vertices to produce a series of vectors interconnecting the vertices that, when taken together produce a cycle that represents a schedule. All the possible schedules are analyzed to determine a schedule that produces the highest throughput of all the schedules.

Abstract: Apparatus and concomitant method for performing priority based scheduling of wafer processing within a multiple chamber semiconductor wafer processing system (cluster tool) having at least one metrology chamber. The sequencer assigns priority values to the chambers and stations in a wafer processing system (i.e., a cluster tool plus a factory interface), then moves wafers from chamber to chamber in accordance with the assigned priorities. The sequencer also selects particular wafers for placement into at least one metrology chamber or station.