Abstract: Systems for processing articles are essential for semiconductor fabrication. In one embodiment, a system is disclosed comprising a plurality of fluid supplies configured to supply process fluids, a plurality of apparatuses for controlling flow, a plurality of mounting substrates, a vacuum manifold fluidly coupled to the plurality of mounting substrates, an outlet manifold fluidly coupled to the plurality of mounting substrates, a vacuum source fluidly coupled to the vacuum manifold, and a processing chamber fluidly coupled to the outlet manifold. The plurality of apparatuses for controlling flow have a bleed port and an outlet. The outlets of the plurality of apparatuses are fluidly coupled to corresponding outlet ports of the plurality of mounting substrates. The bleed ports of the plurality of apparatuses are fluidly coupled to the corresponding vacuum ports of the plurality of mounting substrates.

Abstract: Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. In an effort to improve packaging density, fluid delivery modules preferably incorporate both active and passive components into a single substrate block. This enables increases in packaging density as well as enabling reduced cost through greater simplification of the fluid delivery module. For instance, incorporating a filter to filter incoming fluid with a valve or other component in a single monolithic block avoids the need for separate components which add cost and complexity.

Abstract: A bellows restraint includes a first bracket having a first mount and a first arm extending from the first mount, a second bracket having a second mount and a second arm extending from the second mount to be adjacent to the first arm with the second arm having at least one through-hole, and a first fastener extending through the at least one through-hole of the second arm to connect to the first arm with the first fastener having a cross-sectional area that is smaller than a cross-sectional area of the at least one through-hole to allow the first bracket to move in relation to the second bracket.

Abstract: A bellows restraint includes a first bracket having a first mount and a first arm extending from the first mount, a second bracket having a second mount and a second arm extending from the second mount to be adjacent to the first arm with the second arm having at least one through-hole, and a first fastener extending through the at least one through-hole of the second arm to connect to the first arm with the first fastener having a cross-sectional area that is smaller than a cross-sectional area of the at least one through-hole to allow the first bracket to move in relation to the second bracket.